JPS57207807A - Signal stabilizing method of pattern detecting device - Google Patents

Signal stabilizing method of pattern detecting device

Info

Publication number
JPS57207807A
JPS57207807A JP9340281A JP9340281A JPS57207807A JP S57207807 A JPS57207807 A JP S57207807A JP 9340281 A JP9340281 A JP 9340281A JP 9340281 A JP9340281 A JP 9340281A JP S57207807 A JPS57207807 A JP S57207807A
Authority
JP
Japan
Prior art keywords
laser light
difference
light
detected
electric signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9340281A
Other languages
Japanese (ja)
Inventor
Moritoshi Ando
Hiroyuki Ikeda
Kikuo Mita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP9340281A priority Critical patent/JPS57207807A/en
Publication of JPS57207807A publication Critical patent/JPS57207807A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques

Abstract

PURPOSE:To elevate reliability of a device, by deriving a difference of signal values of the quantity of light in case when laser light has been made incident to an optical detector, and a residual drift portion in case when it has cut off, and setting a new slice level of a prescribed value from said difference and known signal value derived in advance by the same method. CONSTITUTION:This device detects a metallic film pattern by scanning laser light from a laser light source 10 and detecting reflection or transmission light by an optical detector 17, and the laser light is made incident to the optical detector 17 through a prescribed optical path, its quantity of light is detected, and it is converted to an electric signal C. Also, the laser light is cut off, a drift portion D of a DC level remaining in the optical detecting circuit is detected, and its difference C-D is derived. When a new slice level S' is set to ns+D against a known slice level S by deriving a ratio n=(C-D)/B of a value of said difference, and a known electric signal B detected and converted in advance by the same method as the electric signal C, a slice of a prescribed ratio is always obtained.
JP9340281A 1981-06-16 1981-06-16 Signal stabilizing method of pattern detecting device Pending JPS57207807A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9340281A JPS57207807A (en) 1981-06-16 1981-06-16 Signal stabilizing method of pattern detecting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9340281A JPS57207807A (en) 1981-06-16 1981-06-16 Signal stabilizing method of pattern detecting device

Publications (1)

Publication Number Publication Date
JPS57207807A true JPS57207807A (en) 1982-12-20

Family

ID=14081299

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9340281A Pending JPS57207807A (en) 1981-06-16 1981-06-16 Signal stabilizing method of pattern detecting device

Country Status (1)

Country Link
JP (1) JPS57207807A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0346015A2 (en) * 1988-06-04 1989-12-13 Fujitsu Limited Optical system for detecting three-dimensional shape

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0346015A2 (en) * 1988-06-04 1989-12-13 Fujitsu Limited Optical system for detecting three-dimensional shape

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