JPS57205342A - Glass photomask - Google Patents

Glass photomask

Info

Publication number
JPS57205342A
JPS57205342A JP9190981A JP9190981A JPS57205342A JP S57205342 A JPS57205342 A JP S57205342A JP 9190981 A JP9190981 A JP 9190981A JP 9190981 A JP9190981 A JP 9190981A JP S57205342 A JPS57205342 A JP S57205342A
Authority
JP
Japan
Prior art keywords
film
glass
sio
metallic
oxide film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9190981A
Other languages
Japanese (ja)
Other versions
JPS643256B2 (en
Inventor
Yoshihiro Ono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KK filed Critical Seiko Epson Corp
Priority to JP9190981A priority Critical patent/JPS57205342A/en
Publication of JPS57205342A publication Critical patent/JPS57205342A/en
Publication of JPS643256B2 publication Critical patent/JPS643256B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
    • C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
    • C03C17/3657—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
    • C03C17/3665—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties specially adapted for use as photomask
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Surface Treatment Of Glass (AREA)
  • Chemically Coating (AREA)

Abstract

PURPOSE: To obtain a glass photomask almost free from pinholes and having enhanced pattern accuracy by forming an oxide film on glass having an SiO2 film, further forming an electroless plated metallic film, and carrying out patterning.
CONSTITUTION: A film of SiO2, Ta2O5 or a mixture thereof is laid on each glass substrate, and on the film an oxide film of ≥1 kind of oxide selected from SnO2, In2O3, Sb3O5, TiO2, Ta2O5, Nb2O5, SiO2, GeO2 and ZrO2 is formed. On the oxide film a metallic film is formed by electroless plating. This metallic film is patterned in the desired shape by a prescribed method. At this time, by forming the oxide film by the hydrolysis of metallic alkoxide, the adhesive strength of the plated film is enhanced. By this method a large number of glass photomasks free from ≥10μm pinholes and having high pattern accuracy are obtd. inexpensively.
COPYRIGHT: (C)1982,JPO&Japio
JP9190981A 1981-06-15 1981-06-15 Glass photomask Granted JPS57205342A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9190981A JPS57205342A (en) 1981-06-15 1981-06-15 Glass photomask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9190981A JPS57205342A (en) 1981-06-15 1981-06-15 Glass photomask

Publications (2)

Publication Number Publication Date
JPS57205342A true JPS57205342A (en) 1982-12-16
JPS643256B2 JPS643256B2 (en) 1989-01-20

Family

ID=14039702

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9190981A Granted JPS57205342A (en) 1981-06-15 1981-06-15 Glass photomask

Country Status (1)

Country Link
JP (1) JPS57205342A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6280655A (en) * 1985-10-04 1987-04-14 Toppan Printing Co Ltd Photomask blank and photomask
JPH05241721A (en) * 1992-02-27 1993-09-21 Totoku Electric Co Ltd Transparent digitizer sensor plate

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6280655A (en) * 1985-10-04 1987-04-14 Toppan Printing Co Ltd Photomask blank and photomask
JPH0414339B2 (en) * 1985-10-04 1992-03-12 Toppan Printing Co Ltd
JPH05241721A (en) * 1992-02-27 1993-09-21 Totoku Electric Co Ltd Transparent digitizer sensor plate

Also Published As

Publication number Publication date
JPS643256B2 (en) 1989-01-20

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