JPS57201858A - Flow rate detection element - Google Patents
Flow rate detection elementInfo
- Publication number
- JPS57201858A JPS57201858A JP56086834A JP8683481A JPS57201858A JP S57201858 A JPS57201858 A JP S57201858A JP 56086834 A JP56086834 A JP 56086834A JP 8683481 A JP8683481 A JP 8683481A JP S57201858 A JPS57201858 A JP S57201858A
- Authority
- JP
- Japan
- Prior art keywords
- flow rate
- detection element
- silicon
- rate detection
- atomic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
- G01P5/10—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring thermal variables
- G01P5/12—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring thermal variables using variation of resistance of a heated conductor
Landscapes
- Engineering & Computer Science (AREA)
- Aviation & Aerospace Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Volume Flow (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56086834A JPS57201858A (en) | 1981-06-08 | 1981-06-08 | Flow rate detection element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56086834A JPS57201858A (en) | 1981-06-08 | 1981-06-08 | Flow rate detection element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57201858A true JPS57201858A (en) | 1982-12-10 |
Family
ID=13897835
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56086834A Pending JPS57201858A (en) | 1981-06-08 | 1981-06-08 | Flow rate detection element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57201858A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5060511A (en) * | 1989-03-31 | 1991-10-29 | Aisan Kogyo Kabushiki Kaisha | Intake air quantity measuring apparatus |
JPH04221716A (ja) * | 1990-12-25 | 1992-08-12 | Mitsubishi Electric Corp | 感熱式流量センサ |
-
1981
- 1981-06-08 JP JP56086834A patent/JPS57201858A/ja active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5060511A (en) * | 1989-03-31 | 1991-10-29 | Aisan Kogyo Kabushiki Kaisha | Intake air quantity measuring apparatus |
US5105660A (en) * | 1989-03-31 | 1992-04-21 | Aisan Kogyo Kabushiki Kaisha | Intake air quantity measuring apparatus |
US5140854A (en) * | 1989-03-31 | 1992-08-25 | Aisan Kogyo Kabushiki Kaisha | Intake air quantity measuring apparatus |
JPH04221716A (ja) * | 1990-12-25 | 1992-08-12 | Mitsubishi Electric Corp | 感熱式流量センサ |
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