JPS57200029A - Exposing device - Google Patents
Exposing deviceInfo
- Publication number
- JPS57200029A JPS57200029A JP56084447A JP8444781A JPS57200029A JP S57200029 A JPS57200029 A JP S57200029A JP 56084447 A JP56084447 A JP 56084447A JP 8444781 A JP8444781 A JP 8444781A JP S57200029 A JPS57200029 A JP S57200029A
- Authority
- JP
- Japan
- Prior art keywords
- positioning
- photomask
- rays
- mirror
- state information
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Light Sources And Details Of Projection-Printing Devices (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Projection-Type Copiers In General (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56084447A JPS57200029A (en) | 1981-06-03 | 1981-06-03 | Exposing device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56084447A JPS57200029A (en) | 1981-06-03 | 1981-06-03 | Exposing device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57200029A true JPS57200029A (en) | 1982-12-08 |
JPH0454216B2 JPH0454216B2 (ja) | 1992-08-28 |
Family
ID=13830856
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56084447A Granted JPS57200029A (en) | 1981-06-03 | 1981-06-03 | Exposing device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57200029A (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60189935A (ja) * | 1984-03-12 | 1985-09-27 | Hitachi Ltd | 投影露光装置 |
JPS62109316A (ja) * | 1985-11-08 | 1987-05-20 | Nippon Kogaku Kk <Nikon> | 投影露光装置 |
JPH06188170A (ja) * | 1993-07-26 | 1994-07-08 | Hitachi Ltd | 投影露光方法 |
JPH07183216A (ja) * | 1994-11-28 | 1995-07-21 | Hitachi Ltd | 投影露光におけるウエーハの位置合せ方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5310459A (en) * | 1976-07-16 | 1978-01-30 | Seiko Instr & Electronics Ltd | Winding stem holding structure for timepieces |
-
1981
- 1981-06-03 JP JP56084447A patent/JPS57200029A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5310459A (en) * | 1976-07-16 | 1978-01-30 | Seiko Instr & Electronics Ltd | Winding stem holding structure for timepieces |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60189935A (ja) * | 1984-03-12 | 1985-09-27 | Hitachi Ltd | 投影露光装置 |
JPS62109316A (ja) * | 1985-11-08 | 1987-05-20 | Nippon Kogaku Kk <Nikon> | 投影露光装置 |
JPH06188170A (ja) * | 1993-07-26 | 1994-07-08 | Hitachi Ltd | 投影露光方法 |
JPH0777194B2 (ja) * | 1993-07-26 | 1995-08-16 | 株式会社日立製作所 | 投影露光方法 |
JPH07183216A (ja) * | 1994-11-28 | 1995-07-21 | Hitachi Ltd | 投影露光におけるウエーハの位置合せ方法 |
Also Published As
Publication number | Publication date |
---|---|
JPH0454216B2 (ja) | 1992-08-28 |
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