JPS57194446A - Charged particle energy analyzer - Google Patents

Charged particle energy analyzer

Info

Publication number
JPS57194446A
JPS57194446A JP56078473A JP7847381A JPS57194446A JP S57194446 A JPS57194446 A JP S57194446A JP 56078473 A JP56078473 A JP 56078473A JP 7847381 A JP7847381 A JP 7847381A JP S57194446 A JPS57194446 A JP S57194446A
Authority
JP
Japan
Prior art keywords
slit
sample
electrode
windows
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56078473A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0351054B2 (enrdf_load_stackoverflow
Inventor
Tadamata Jinno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Shimazu Seisakusho KK
Original Assignee
Shimadzu Corp
Shimazu Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp, Shimazu Seisakusho KK filed Critical Shimadzu Corp
Priority to JP56078473A priority Critical patent/JPS57194446A/ja
Publication of JPS57194446A publication Critical patent/JPS57194446A/ja
Publication of JPH0351054B2 publication Critical patent/JPH0351054B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measurement Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
JP56078473A 1981-05-22 1981-05-22 Charged particle energy analyzer Granted JPS57194446A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56078473A JPS57194446A (en) 1981-05-22 1981-05-22 Charged particle energy analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56078473A JPS57194446A (en) 1981-05-22 1981-05-22 Charged particle energy analyzer

Publications (2)

Publication Number Publication Date
JPS57194446A true JPS57194446A (en) 1982-11-30
JPH0351054B2 JPH0351054B2 (enrdf_load_stackoverflow) 1991-08-05

Family

ID=13662980

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56078473A Granted JPS57194446A (en) 1981-05-22 1981-05-22 Charged particle energy analyzer

Country Status (1)

Country Link
JP (1) JPS57194446A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4742224A (en) * 1986-12-22 1988-05-03 American Telephone And Telegraph Company At&T Bell Laboratories Charged particle energy filter
EP0554814A1 (de) 1992-02-03 1993-08-11 Forschungszentrum Jülich Gmbh Elektrostatischer Deflektor mit allgemein zylindrischer Grundform
JP2007248081A (ja) * 2006-03-14 2007-09-27 Kyoto Univ 光子ビーム発生装置及び該方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5028393A (enrdf_load_stackoverflow) * 1973-05-08 1975-03-22
JPS5135388A (enrdf_load_stackoverflow) * 1974-09-20 1976-03-25 Hitachi Ltd

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5028393A (enrdf_load_stackoverflow) * 1973-05-08 1975-03-22
JPS5135388A (enrdf_load_stackoverflow) * 1974-09-20 1976-03-25 Hitachi Ltd

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4742224A (en) * 1986-12-22 1988-05-03 American Telephone And Telegraph Company At&T Bell Laboratories Charged particle energy filter
EP0554814A1 (de) 1992-02-03 1993-08-11 Forschungszentrum Jülich Gmbh Elektrostatischer Deflektor mit allgemein zylindrischer Grundform
US5357107A (en) * 1992-02-03 1994-10-18 Forschungszentrum Julich Gmbh Electrostatic deflector with generally cylindrical configuration
EP0554814B1 (de) * 1992-02-03 2001-06-20 Forschungszentrum Jülich Gmbh Elektrostatischer Deflektor mit allgemein zylindrischer Grundform
JP2007248081A (ja) * 2006-03-14 2007-09-27 Kyoto Univ 光子ビーム発生装置及び該方法

Also Published As

Publication number Publication date
JPH0351054B2 (enrdf_load_stackoverflow) 1991-08-05

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