JPS57193023A - Heater assembly - Google Patents

Heater assembly

Info

Publication number
JPS57193023A
JPS57193023A JP7809381A JP7809381A JPS57193023A JP S57193023 A JPS57193023 A JP S57193023A JP 7809381 A JP7809381 A JP 7809381A JP 7809381 A JP7809381 A JP 7809381A JP S57193023 A JPS57193023 A JP S57193023A
Authority
JP
Japan
Prior art keywords
substrate
heat source
source substance
temperature
soaking plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7809381A
Other languages
Japanese (ja)
Other versions
JPH0122722B2 (en
Inventor
Minoru Tanaka
Hitoshi Kubota
Susumu Aiuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7809381A priority Critical patent/JPS57193023A/en
Publication of JPS57193023A publication Critical patent/JPS57193023A/en
Publication of JPH0122722B2 publication Critical patent/JPH0122722B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/541—Heating or cooling of the substrates

Abstract

PURPOSE:To exactly measure substrate temperature for control by a method wherein an oscillating heat source substance having a heater and a cooling channel is freely connected to a support member and the whole part of the heat source substance is sealed in a vacuum container so that the heat source substance may vertically move to the surface of a substrate and the heating efficiency of the substrate is increased. CONSTITUTION:With a substrate 2 placed on a substrate holder 3 and a support member 6 dropped to the upper surface of the substrate 2, a heat source substance 7 also descends. A soaking plate 10 abuts onthe substrate 2 by arriving the heat source substance 7 at a predetermined position and the soaking plate 10 closely contacts with the substrate 2 by corresponding to the surface of the substrate 2 with an action by piano wire 11 or disc plate spring 15. The heat source substance 7 is heated up to a predetermined temperature while measuring the temperature by thermocouple 13. For cooling, cooling water is supplied to a channel 9 under the same condition. The substrate and the heat source substance are closely contacted under vacuum condition. Therefore, good heating efficiency of the subrate can be obtained. The surface of the soaking plate is of the same material as that of the substrate and a temperature sensed element buried the thermocouple is screwed to have the same contact condition as that of the substrate and exact temperature measurement and control can be performed with easy installation and high reproducibility.
JP7809381A 1981-05-25 1981-05-25 Heater assembly Granted JPS57193023A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7809381A JPS57193023A (en) 1981-05-25 1981-05-25 Heater assembly

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7809381A JPS57193023A (en) 1981-05-25 1981-05-25 Heater assembly

Publications (2)

Publication Number Publication Date
JPS57193023A true JPS57193023A (en) 1982-11-27
JPH0122722B2 JPH0122722B2 (en) 1989-04-27

Family

ID=13652240

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7809381A Granted JPS57193023A (en) 1981-05-25 1981-05-25 Heater assembly

Country Status (1)

Country Link
JP (1) JPS57193023A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63143256A (en) * 1986-12-04 1988-06-15 Anelva Corp Sputtering device
JPS63137932U (en) * 1987-03-02 1988-09-12

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63143256A (en) * 1986-12-04 1988-06-15 Anelva Corp Sputtering device
JPS63137932U (en) * 1987-03-02 1988-09-12

Also Published As

Publication number Publication date
JPH0122722B2 (en) 1989-04-27

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