JPS57192625A - Miniature rotary bearing - Google Patents

Miniature rotary bearing

Info

Publication number
JPS57192625A
JPS57192625A JP56076870A JP7687081A JPS57192625A JP S57192625 A JPS57192625 A JP S57192625A JP 56076870 A JP56076870 A JP 56076870A JP 7687081 A JP7687081 A JP 7687081A JP S57192625 A JPS57192625 A JP S57192625A
Authority
JP
Japan
Prior art keywords
springboards
shaft member
shaft
coupling
rotary bearing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56076870A
Other languages
Japanese (ja)
Inventor
Masashi Okada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp, Nippon Kogaku KK filed Critical Nikon Corp
Priority to JP56076870A priority Critical patent/JPS57192625A/en
Publication of JPS57192625A publication Critical patent/JPS57192625A/en
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16D—COUPLINGS FOR TRANSMITTING ROTATION; CLUTCHES; BRAKES
    • F16D3/00—Yielding couplings, i.e. with means permitting movement between the connected parts during the drive
    • F16D3/005—Yielding couplings, i.e. with means permitting movement between the connected parts during the drive incorporating leaf springs, flexible parts of reduced thickness or the like acting as pivots

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:In a miniature rotary bearing to be used for a wafer inspecter, to eliminate the eccentricity to be produced between both shaft members, by coupling the springboards of the shaft member through a coupling rod and making the elastic deformation of each springboards same at the relative displacement of said shaft members. CONSTITUTION:Four sheets of radial first springboards 23 are secured at the circumferential face of the first shaft member 21 such that they will form the angle of 90 deg. each other. The second springboard 24 facing with the first springboard 23 is secured around the second shaft member 22 provided coaxially with said first shaft member 21 then the other ends of said springboards 23, 24 are coupled through a coupling rod 25. Under this state when securing the first shaft member 21 while rotating the second shaft member 22 by the minute angle of theta, the springboards 23 and 24 will bend in the opposite direction and the line (n) of the coupling board 25 will rotate around the center (l) by the minute angle of theta/2. Here the elastic deformation of the springboards 23, 24 will occur under the same condition, thereby the shaft members 21 and 22 will never be in eccentric nor the linearity of the axis is damaged.
JP56076870A 1981-05-21 1981-05-21 Miniature rotary bearing Pending JPS57192625A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56076870A JPS57192625A (en) 1981-05-21 1981-05-21 Miniature rotary bearing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56076870A JPS57192625A (en) 1981-05-21 1981-05-21 Miniature rotary bearing

Publications (1)

Publication Number Publication Date
JPS57192625A true JPS57192625A (en) 1982-11-26

Family

ID=13617669

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56076870A Pending JPS57192625A (en) 1981-05-21 1981-05-21 Miniature rotary bearing

Country Status (1)

Country Link
JP (1) JPS57192625A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4551118A (en) * 1984-03-05 1985-11-05 Burroughs Corporation Coupled drive shaft

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4551118A (en) * 1984-03-05 1985-11-05 Burroughs Corporation Coupled drive shaft

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