JPS57192016A - Manufacture of thin film - Google Patents

Manufacture of thin film

Info

Publication number
JPS57192016A
JPS57192016A JP56077786A JP7778681A JPS57192016A JP S57192016 A JPS57192016 A JP S57192016A JP 56077786 A JP56077786 A JP 56077786A JP 7778681 A JP7778681 A JP 7778681A JP S57192016 A JPS57192016 A JP S57192016A
Authority
JP
Japan
Prior art keywords
base material
high molecular
winding
evaporation
molecular base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56077786A
Other languages
Japanese (ja)
Inventor
Koichi Shinohara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP56077786A priority Critical patent/JPS57192016A/en
Publication of JPS57192016A publication Critical patent/JPS57192016A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02612—Formation types
    • H01L21/02617—Deposition types
    • H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD

Abstract

PURPOSE:To remove powdered dust, and to prevent the generation of a pin hole by electrifying and making travel a high molecular base material prior to evaporation. CONSTITUTION:A flexible high molecular base material 3 is wound by means of a winding system consisted of a forwarding shaft 8, a winding shaft 9, rollers 6, expander rollers 7 and a rotary drum 5. A shutter 10 is opened in a process in which the speed of the base material wound increases to the predetermined speed of winding, and vapor obtained by heating an evaporating material 1 by electron beams, etc. is evaporated. The high molecular base material 3 is electrified and made travel prior to the starting of evaporation, and dust in an evaporator is attached and removed.
JP56077786A 1981-05-21 1981-05-21 Manufacture of thin film Pending JPS57192016A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56077786A JPS57192016A (en) 1981-05-21 1981-05-21 Manufacture of thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56077786A JPS57192016A (en) 1981-05-21 1981-05-21 Manufacture of thin film

Publications (1)

Publication Number Publication Date
JPS57192016A true JPS57192016A (en) 1982-11-26

Family

ID=13643648

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56077786A Pending JPS57192016A (en) 1981-05-21 1981-05-21 Manufacture of thin film

Country Status (1)

Country Link
JP (1) JPS57192016A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4888061A (en) * 1988-09-01 1989-12-19 Minnesota Mining And Manufacturing Company Thin-film solar cells resistant to damage during flexion

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4888061A (en) * 1988-09-01 1989-12-19 Minnesota Mining And Manufacturing Company Thin-film solar cells resistant to damage during flexion

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