JPS57188671A - Formation of glow discharge film - Google Patents

Formation of glow discharge film

Info

Publication number
JPS57188671A
JPS57188671A JP7346481A JP7346481A JPS57188671A JP S57188671 A JPS57188671 A JP S57188671A JP 7346481 A JP7346481 A JP 7346481A JP 7346481 A JP7346481 A JP 7346481A JP S57188671 A JPS57188671 A JP S57188671A
Authority
JP
Japan
Prior art keywords
drums
electrode
glow discharge
films
cylindrical shape
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7346481A
Other languages
Japanese (ja)
Inventor
Akira Uchiyama
Masahiro Akiyama
Satoru Nishikawa
Katsuzo Uenishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP7346481A priority Critical patent/JPS57188671A/en
Publication of JPS57188671A publication Critical patent/JPS57188671A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
    • C23C16/509—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using internal electrodes
    • C23C16/5093—Coaxial electrodes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Photoreceptors In Electrophotography (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

PURPOSE:To form uniform films of the same quality on plural drums by applying electric fields between the plural drums provided in a single furnace and an electrode placed to face the side faces of the drums thereby forming the decomposted films of gaseous raw materials on the surfaces of the respective drums. CONSTITUTION:Films are formed by a capacity coupling type glow discharge film forming method on the surfaces of drums 2-1, 2-2, 2-3, 2-4, 2-5, 2-6 of a cylindrical shape disposed in a growing furnace of a cylindrical shape. At this time, a plurality of said drums are provided in the single furnace, and an electrode 2-7 of a cylindrical shape enclosing the drums is provided. The distances l1-l6 between the drums and the electrode 2-7 are set at l1=l2=l3=l4=l5= l6, and while the respective drums are rotated in arrows y1, y2, y3, y4, y5, y6 directions, glow discharge is generated between the drum surfaces and the electrode 2-7. Then, the gaseous raw materials existing between the drums and the electrode 2-7 are decomposed by the glow discharge and films are formed on the outside surfaces of the drums.
JP7346481A 1981-05-18 1981-05-18 Formation of glow discharge film Pending JPS57188671A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7346481A JPS57188671A (en) 1981-05-18 1981-05-18 Formation of glow discharge film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7346481A JPS57188671A (en) 1981-05-18 1981-05-18 Formation of glow discharge film

Publications (1)

Publication Number Publication Date
JPS57188671A true JPS57188671A (en) 1982-11-19

Family

ID=13519001

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7346481A Pending JPS57188671A (en) 1981-05-18 1981-05-18 Formation of glow discharge film

Country Status (1)

Country Link
JP (1) JPS57188671A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58132755A (en) * 1982-02-03 1983-08-08 Toshiba Corp Method and device for production of amorphous silicon photoreceptor
JPS60133478U (en) * 1984-02-14 1985-09-05 三洋電機株式会社 photoreceptor drum
JPH0354573A (en) * 1990-08-08 1991-03-08 Sanyo Electric Co Ltd Production of photosensitive drum

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58132755A (en) * 1982-02-03 1983-08-08 Toshiba Corp Method and device for production of amorphous silicon photoreceptor
JPH0338586B2 (en) * 1982-02-03 1991-06-11 Tokyo Shibaura Electric Co
JPS60133478U (en) * 1984-02-14 1985-09-05 三洋電機株式会社 photoreceptor drum
JPH0354573A (en) * 1990-08-08 1991-03-08 Sanyo Electric Co Ltd Production of photosensitive drum

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