JPS57187934A - Manufacture of indium-antimony system mixing crystal - Google Patents

Manufacture of indium-antimony system mixing crystal

Info

Publication number
JPS57187934A
JPS57187934A JP56072464A JP7246481A JPS57187934A JP S57187934 A JPS57187934 A JP S57187934A JP 56072464 A JP56072464 A JP 56072464A JP 7246481 A JP7246481 A JP 7246481A JP S57187934 A JPS57187934 A JP S57187934A
Authority
JP
Japan
Prior art keywords
indium
substrate
manufacture
antimony
system mixing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56072464A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0115135B2 (cs
Inventor
Takeki Matsui
Keiji Kuboyama
Takeo Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asahi Kasei Corp
Asahi Chemical Industry Co Ltd
Original Assignee
Asahi Chemical Industry Co Ltd
Asahi Kasei Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Chemical Industry Co Ltd, Asahi Kasei Kogyo KK filed Critical Asahi Chemical Industry Co Ltd
Priority to JP56072464A priority Critical patent/JPS57187934A/ja
Priority to US06/361,939 priority patent/US4468415A/en
Priority to AT82102605T priority patent/ATE20629T1/de
Priority to EP82102605A priority patent/EP0062818B2/en
Priority to DE8282102605T priority patent/DE3271874D1/de
Priority to KR8201347A priority patent/KR860000161B1/ko
Publication of JPS57187934A publication Critical patent/JPS57187934A/ja
Priority to US06/620,645 priority patent/US4539178A/en
Publication of JPH0115135B2 publication Critical patent/JPH0115135B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02367—Substrates
    • H01L21/0237—Materials
    • H01L21/0242—Crystalline insulating materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02521—Materials
    • H01L21/02538—Group 13/15 materials
    • H01L21/02549—Antimonides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02612—Formation types
    • H01L21/02617—Deposition types
    • H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Hall/Mr Elements (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP56072464A 1981-03-30 1981-05-14 Manufacture of indium-antimony system mixing crystal Granted JPS57187934A (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP56072464A JPS57187934A (en) 1981-05-14 1981-05-14 Manufacture of indium-antimony system mixing crystal
US06/361,939 US4468415A (en) 1981-03-30 1982-03-25 Indium-antimony complex crystal semiconductor and process for production thereof
AT82102605T ATE20629T1 (de) 1981-03-30 1982-03-27 Indium-antimon-halbleiter mit komplexer kristalliner struktur und verfahren zu seiner herstellung.
EP82102605A EP0062818B2 (en) 1981-03-30 1982-03-27 Process of producing a hall element or magnetoresistive element comprising an indium-antimony complex crystal semiconductor
DE8282102605T DE3271874D1 (en) 1981-03-30 1982-03-27 Indium-antimony complex crystal semiconductor and process for production thereof
KR8201347A KR860000161B1 (ko) 1981-03-30 1982-03-29 인듐 안티몬계 복합 결정반도체 및 그 제조방법
US06/620,645 US4539178A (en) 1981-03-30 1984-06-14 Indium-antimony complex crystal semiconductor and process for production thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56072464A JPS57187934A (en) 1981-05-14 1981-05-14 Manufacture of indium-antimony system mixing crystal

Publications (2)

Publication Number Publication Date
JPS57187934A true JPS57187934A (en) 1982-11-18
JPH0115135B2 JPH0115135B2 (cs) 1989-03-15

Family

ID=13490047

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56072464A Granted JPS57187934A (en) 1981-03-30 1981-05-14 Manufacture of indium-antimony system mixing crystal

Country Status (1)

Country Link
JP (1) JPS57187934A (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2006070826A1 (ja) 2004-12-28 2008-08-07 旭化成エレクトロニクス株式会社 磁気方式回転角センサ、および、角度情報処理装置

Also Published As

Publication number Publication date
JPH0115135B2 (cs) 1989-03-15

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