JPS57187851A - Secondary ion mass analyzing unit - Google Patents

Secondary ion mass analyzing unit

Info

Publication number
JPS57187851A
JPS57187851A JP56072514A JP7251481A JPS57187851A JP S57187851 A JPS57187851 A JP S57187851A JP 56072514 A JP56072514 A JP 56072514A JP 7251481 A JP7251481 A JP 7251481A JP S57187851 A JPS57187851 A JP S57187851A
Authority
JP
Japan
Prior art keywords
light
sample
semitransparent mirror
reflected
receiving face
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56072514A
Other languages
English (en)
Japanese (ja)
Other versions
JPH027510B2 (OSRAM
Inventor
Yasubumi Kameshima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP56072514A priority Critical patent/JPS57187851A/ja
Publication of JPS57187851A publication Critical patent/JPS57187851A/ja
Publication of JPH027510B2 publication Critical patent/JPH027510B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
JP56072514A 1981-05-14 1981-05-14 Secondary ion mass analyzing unit Granted JPS57187851A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56072514A JPS57187851A (en) 1981-05-14 1981-05-14 Secondary ion mass analyzing unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56072514A JPS57187851A (en) 1981-05-14 1981-05-14 Secondary ion mass analyzing unit

Publications (2)

Publication Number Publication Date
JPS57187851A true JPS57187851A (en) 1982-11-18
JPH027510B2 JPH027510B2 (OSRAM) 1990-02-19

Family

ID=13491517

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56072514A Granted JPS57187851A (en) 1981-05-14 1981-05-14 Secondary ion mass analyzing unit

Country Status (1)

Country Link
JP (1) JPS57187851A (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012007832A1 (en) * 2010-07-14 2012-01-19 University Of Cape Town Depth control of laser cutter

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012007832A1 (en) * 2010-07-14 2012-01-19 University Of Cape Town Depth control of laser cutter

Also Published As

Publication number Publication date
JPH027510B2 (OSRAM) 1990-02-19

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