JPS57186325A - Specimen processor with pulse electron beam - Google Patents

Specimen processor with pulse electron beam

Info

Publication number
JPS57186325A
JPS57186325A JP57072482A JP7248282A JPS57186325A JP S57186325 A JPS57186325 A JP S57186325A JP 57072482 A JP57072482 A JP 57072482A JP 7248282 A JP7248282 A JP 7248282A JP S57186325 A JPS57186325 A JP S57186325A
Authority
JP
Japan
Prior art keywords
electron beam
pulse electron
specimen processor
specimen
processor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP57072482A
Other languages
English (en)
Japanese (ja)
Inventor
Burueru Mishieru
Furotsukari Mishieru
Mishiyoo Jiyannfuransowa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of JPS57186325A publication Critical patent/JPS57186325A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Plasma Technology (AREA)
  • Electron Sources, Ion Sources (AREA)
JP57072482A 1981-04-28 1982-04-28 Specimen processor with pulse electron beam Pending JPS57186325A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8108449A FR2504727A1 (fr) 1981-04-28 1981-04-28 Dispositif de traitement d'un echantillon par faisceau electronique impulsionnel

Publications (1)

Publication Number Publication Date
JPS57186325A true JPS57186325A (en) 1982-11-16

Family

ID=9257870

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57072482A Pending JPS57186325A (en) 1981-04-28 1982-04-28 Specimen processor with pulse electron beam

Country Status (5)

Country Link
US (1) US4527044A (enExample)
EP (1) EP0064003B1 (enExample)
JP (1) JPS57186325A (enExample)
DE (1) DE3262385D1 (enExample)
FR (1) FR2504727A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63119591A (ja) * 1986-10-09 1988-05-24 アモコ・コーポレーション 薄い固体フィルムからなる層状構造体の選択的混合方法

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62222633A (ja) * 1986-03-25 1987-09-30 Sharp Corp 半導体素子の製造方法
US4894511A (en) * 1986-08-26 1990-01-16 Physical Sciences, Inc. Source of high flux energetic atoms
US5003178A (en) * 1988-11-14 1991-03-26 Electron Vision Corporation Large-area uniform electron source
US4904866A (en) * 1988-11-17 1990-02-27 Applied Electron Corporation Wide area soft vacuum abnormal glow electron beam discharge hardening process
US5159170A (en) * 1991-04-26 1992-10-27 International Business Machines Corporation Grid structure for reducing current density in focussed ion beam
US5449989A (en) * 1992-07-31 1995-09-12 Correa; Paulo N. Energy conversion system
CA2126251A1 (en) 1994-02-18 1995-08-19 Ronald Sinclair Nohr Process of enhanced chemical bonding by electron beam radiation
US5465030A (en) * 1995-01-20 1995-11-07 The United States Of America As Represented By The Secretary Of The Army Trigger apparatus for spark gap dischargers
WO2007149460A2 (en) * 2006-06-20 2007-12-27 Chism William W Method of direct coulomb explosion in laser ablation of semiconductor structures
FR2978600B1 (fr) 2011-07-25 2014-02-07 Soitec Silicon On Insulator Procede et dispositif de fabrication de couche de materiau semi-conducteur

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3955091A (en) * 1974-11-11 1976-05-04 Accelerators, Inc. Method and apparatus for extracting well-formed, high current ion beams from a plasma source
US3950187A (en) * 1974-11-15 1976-04-13 Simulation Physics, Inc. Method and apparatus involving pulsed electron beam processing of semiconductor devices
US4082958A (en) * 1975-11-28 1978-04-04 Simulation Physics, Inc. Apparatus involving pulsed electron beam processing of semiconductor devices
US4301391A (en) * 1979-04-26 1981-11-17 Hughes Aircraft Company Dual discharge plasma device
US4335297A (en) * 1979-09-18 1982-06-15 Spire Corporation Electron beam processor
US4344019A (en) * 1980-11-10 1982-08-10 The United States Of America As Represented By The United States Department Of Energy Penning discharge ion source with self-cleaning aperture

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63119591A (ja) * 1986-10-09 1988-05-24 アモコ・コーポレーション 薄い固体フィルムからなる層状構造体の選択的混合方法

Also Published As

Publication number Publication date
FR2504727B1 (enExample) 1983-05-27
DE3262385D1 (en) 1985-03-28
FR2504727A1 (fr) 1982-10-29
EP0064003B1 (fr) 1985-02-20
EP0064003A1 (fr) 1982-11-03
US4527044A (en) 1985-07-02

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