JPS57186075A - Cryo-pump and operating method thereof - Google Patents

Cryo-pump and operating method thereof

Info

Publication number
JPS57186075A
JPS57186075A JP7014781A JP7014781A JPS57186075A JP S57186075 A JPS57186075 A JP S57186075A JP 7014781 A JP7014781 A JP 7014781A JP 7014781 A JP7014781 A JP 7014781A JP S57186075 A JPS57186075 A JP S57186075A
Authority
JP
Japan
Prior art keywords
shield
pump
cooling
flange
screw
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7014781A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6119832B2 (enrdf_load_stackoverflow
Inventor
Masaki Saito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Nihon Shinku Gijutsu KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc, Nihon Shinku Gijutsu KK filed Critical Ulvac Inc
Priority to JP7014781A priority Critical patent/JPS57186075A/ja
Publication of JPS57186075A publication Critical patent/JPS57186075A/ja
Publication of JPS6119832B2 publication Critical patent/JPS6119832B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP7014781A 1981-05-12 1981-05-12 Cryo-pump and operating method thereof Granted JPS57186075A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7014781A JPS57186075A (en) 1981-05-12 1981-05-12 Cryo-pump and operating method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7014781A JPS57186075A (en) 1981-05-12 1981-05-12 Cryo-pump and operating method thereof

Publications (2)

Publication Number Publication Date
JPS57186075A true JPS57186075A (en) 1982-11-16
JPS6119832B2 JPS6119832B2 (enrdf_load_stackoverflow) 1986-05-19

Family

ID=13423164

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7014781A Granted JPS57186075A (en) 1981-05-12 1981-05-12 Cryo-pump and operating method thereof

Country Status (1)

Country Link
JP (1) JPS57186075A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59186491U (ja) * 1983-05-30 1984-12-11 アルバツク・クライオ株式会社 クライオポンプに於けるポンプケ−ス
JPS606892U (ja) * 1983-06-28 1985-01-18 アルパツク・クライオ株式会社 小型ヘリウム冷凍機式クライオポンプ
US5305612A (en) * 1992-07-06 1994-04-26 Ebara Technologies Incorporated Cryopump method and apparatus
JP2009158649A (ja) * 2007-12-26 2009-07-16 Nitto Electric Works Ltd 電気機器収納用箱

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01118912A (ja) * 1987-10-30 1989-05-11 Brother Ind Ltd 表示装置保持機構
JPH0238995U (enrdf_load_stackoverflow) * 1988-09-06 1990-03-15

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59186491U (ja) * 1983-05-30 1984-12-11 アルバツク・クライオ株式会社 クライオポンプに於けるポンプケ−ス
JPS606892U (ja) * 1983-06-28 1985-01-18 アルパツク・クライオ株式会社 小型ヘリウム冷凍機式クライオポンプ
US5305612A (en) * 1992-07-06 1994-04-26 Ebara Technologies Incorporated Cryopump method and apparatus
JP2009158649A (ja) * 2007-12-26 2009-07-16 Nitto Electric Works Ltd 電気機器収納用箱

Also Published As

Publication number Publication date
JPS6119832B2 (enrdf_load_stackoverflow) 1986-05-19

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