JPS57182604A - Interference measuring device - Google Patents

Interference measuring device

Info

Publication number
JPS57182604A
JPS57182604A JP56069189A JP6918981A JPS57182604A JP S57182604 A JPS57182604 A JP S57182604A JP 56069189 A JP56069189 A JP 56069189A JP 6918981 A JP6918981 A JP 6918981A JP S57182604 A JPS57182604 A JP S57182604A
Authority
JP
Japan
Prior art keywords
reflected
inspected
light
semitransparent
becomes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56069189A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0334002B2 (enrdf_load_stackoverflow
Inventor
Tetsuo Sueda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP56069189A priority Critical patent/JPS57182604A/ja
Publication of JPS57182604A publication Critical patent/JPS57182604A/ja
Publication of JPH0334002B2 publication Critical patent/JPH0334002B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02022—Interferometers characterised by the beam path configuration contacting one object by grazing incidence

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
JP56069189A 1981-05-07 1981-05-07 Interference measuring device Granted JPS57182604A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56069189A JPS57182604A (en) 1981-05-07 1981-05-07 Interference measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56069189A JPS57182604A (en) 1981-05-07 1981-05-07 Interference measuring device

Publications (2)

Publication Number Publication Date
JPS57182604A true JPS57182604A (en) 1982-11-10
JPH0334002B2 JPH0334002B2 (enrdf_load_stackoverflow) 1991-05-21

Family

ID=13395526

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56069189A Granted JPS57182604A (en) 1981-05-07 1981-05-07 Interference measuring device

Country Status (1)

Country Link
JP (1) JPS57182604A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002206914A (ja) * 2001-01-11 2002-07-26 Fuji Photo Optical Co Ltd 斜入射干渉計装置
US6885459B2 (en) 1996-01-24 2005-04-26 Nanopro Luftlager-Produktions-Und Messtechnik Gmbh Apparatus and method for measuring two opposite surfaces of a body
US7057741B1 (en) 1999-06-18 2006-06-06 Kla-Tencor Corporation Reduced coherence symmetric grazing incidence differential interferometer

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6885459B2 (en) 1996-01-24 2005-04-26 Nanopro Luftlager-Produktions-Und Messtechnik Gmbh Apparatus and method for measuring two opposite surfaces of a body
US7057741B1 (en) 1999-06-18 2006-06-06 Kla-Tencor Corporation Reduced coherence symmetric grazing incidence differential interferometer
US7173715B2 (en) 1999-06-18 2007-02-06 Kla-Tencor Corporation Reduced coherence symmetric grazing incidence differential interferometer
US8786842B2 (en) 1999-06-18 2014-07-22 Kla-Tencor Corporation Grazing and normal incidence interferometer having common reference surface
JP2002206914A (ja) * 2001-01-11 2002-07-26 Fuji Photo Optical Co Ltd 斜入射干渉計装置

Also Published As

Publication number Publication date
JPH0334002B2 (enrdf_load_stackoverflow) 1991-05-21

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