JPS5717549A - Improvement of electronic probe image - Google Patents

Improvement of electronic probe image

Info

Publication number
JPS5717549A
JPS5717549A JP9239480A JP9239480A JPS5717549A JP S5717549 A JPS5717549 A JP S5717549A JP 9239480 A JP9239480 A JP 9239480A JP 9239480 A JP9239480 A JP 9239480A JP S5717549 A JPS5717549 A JP S5717549A
Authority
JP
Japan
Prior art keywords
probe
electronic
signal
cathode
electronic computer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9239480A
Other languages
English (en)
Inventor
Fumio Kataki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP9239480A priority Critical patent/JPS5717549A/ja
Publication of JPS5717549A publication Critical patent/JPS5717549A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP9239480A 1980-07-07 1980-07-07 Improvement of electronic probe image Pending JPS5717549A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9239480A JPS5717549A (en) 1980-07-07 1980-07-07 Improvement of electronic probe image

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9239480A JPS5717549A (en) 1980-07-07 1980-07-07 Improvement of electronic probe image

Publications (1)

Publication Number Publication Date
JPS5717549A true JPS5717549A (en) 1982-01-29

Family

ID=14053195

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9239480A Pending JPS5717549A (en) 1980-07-07 1980-07-07 Improvement of electronic probe image

Country Status (1)

Country Link
JP (1) JPS5717549A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0982257A (ja) * 1995-09-14 1997-03-28 Toshiba Corp 荷電粒子光学鏡筒における非点収差の補正及び焦点合わせ方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0982257A (ja) * 1995-09-14 1997-03-28 Toshiba Corp 荷電粒子光学鏡筒における非点収差の補正及び焦点合わせ方法

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