Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RIKEN
Original Assignee
RIKEN
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Filing date
Publication date
Application filed by RIKENfiledCriticalRIKEN
Priority to JP56056758ApriorityCriticalpatent/JPS57172642A/ja
Publication of JPS57172642ApublicationCriticalpatent/JPS57172642A/ja
Publication of JPS6245663B2publicationCriticalpatent/JPS6245663B2/ja
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/02—Details
H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
Landscapes
Chemical & Material Sciences
(AREA)
Analytical Chemistry
(AREA)
JP56056758A1981-04-151981-04-15Deflector for charged particles
GrantedJPS57172642A
(en)
Linearly structured multiple aperture and beam blanking electrodes for the production of a multiplicity of individually blankable corpuscular beam probes in a lithography apparatus