JPS57170842A - Surface treatment - Google Patents
Surface treatmentInfo
- Publication number
- JPS57170842A JPS57170842A JP5383981A JP5383981A JPS57170842A JP S57170842 A JPS57170842 A JP S57170842A JP 5383981 A JP5383981 A JP 5383981A JP 5383981 A JP5383981 A JP 5383981A JP S57170842 A JPS57170842 A JP S57170842A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- pva
- polishing
- polished
- soln
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To form protective films preventing the sticking of foreign matter and the formation of a compound layer and capable of being simply removed on the surfaces of a substrate by solidifying a PVA soln. used to polish the substrate by drying after finishing the final polishing.
CONSTITUTION: Each rough polished glass substrate 3 for forming a photomask is finally polished with a both-side lapping apparatus composed of strictly flattened lower and upper tables 1, 2 and a carrier 4 made of metallic plate which is thinner than the substrate 3 to be treated and provided with the function of conducting rotation and revolution while guiding the substrate 3. The substrate 3 is mounted in the carrier 4 between the tables 1, 2, about 3kg/cm2 pressure is applied from the table 2, and the substrate 3 is polished while injecting a polishing liq. 5 prepared by adding about 10wt% Zr powder to an about 5% aqueous PVA soln. After finishing the polishing, the PVA soln. on the substrate 3 is freed of water by drying to form protective films of solid PVA contg. the abrasive on the surfaces of the substrate 3.
COPYRIGHT: (C)1982,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5383981A JPS57170842A (en) | 1981-04-10 | 1981-04-10 | Surface treatment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5383981A JPS57170842A (en) | 1981-04-10 | 1981-04-10 | Surface treatment |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57170842A true JPS57170842A (en) | 1982-10-21 |
Family
ID=12953946
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5383981A Pending JPS57170842A (en) | 1981-04-10 | 1981-04-10 | Surface treatment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57170842A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114315424A (en) * | 2022-01-14 | 2022-04-12 | 江西宁新新材料股份有限公司 | Preparation method of high-temperature-resistant coating and application of high-temperature-resistant coating in graphite product |
-
1981
- 1981-04-10 JP JP5383981A patent/JPS57170842A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114315424A (en) * | 2022-01-14 | 2022-04-12 | 江西宁新新材料股份有限公司 | Preparation method of high-temperature-resistant coating and application of high-temperature-resistant coating in graphite product |
CN114315424B (en) * | 2022-01-14 | 2022-10-21 | 江西宁新新材料股份有限公司 | Preparation method of high-temperature-resistant coating and application of high-temperature-resistant coating in graphite product |
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