JPS57170820A - Manufacture of structural boron material - Google Patents
Manufacture of structural boron materialInfo
- Publication number
- JPS57170820A JPS57170820A JP5736981A JP5736981A JPS57170820A JP S57170820 A JPS57170820 A JP S57170820A JP 5736981 A JP5736981 A JP 5736981A JP 5736981 A JP5736981 A JP 5736981A JP S57170820 A JPS57170820 A JP S57170820A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- coated
- boron
- manufacture
- structural
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 title abstract 4
- 229910052796 boron Inorganic materials 0.000 title abstract 4
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 239000000463 material Substances 0.000 title abstract 2
- 239000000758 substrate Substances 0.000 abstract 6
- 229910052750 molybdenum Inorganic materials 0.000 abstract 3
- 229910052758 niobium Inorganic materials 0.000 abstract 3
- 229910052715 tantalum Inorganic materials 0.000 abstract 3
- 238000005229 chemical vapour deposition Methods 0.000 abstract 2
- 239000011248 coating agent Substances 0.000 abstract 2
- 238000000576 coating method Methods 0.000 abstract 2
- 238000010438 heat treatment Methods 0.000 abstract 2
- 229910052721 tungsten Inorganic materials 0.000 abstract 2
- 229910021578 Iron(III) chloride Inorganic materials 0.000 abstract 1
- 238000000354 decomposition reaction Methods 0.000 abstract 1
- 238000000151 deposition Methods 0.000 abstract 1
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 238000007747 plating Methods 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 abstract 1
- 238000001771 vacuum deposition Methods 0.000 abstract 1
Landscapes
- Chemical Vapour Deposition (AREA)
- Diaphragms For Electromechanical Transducers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5736981A JPS57170820A (en) | 1981-04-15 | 1981-04-15 | Manufacture of structural boron material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5736981A JPS57170820A (en) | 1981-04-15 | 1981-04-15 | Manufacture of structural boron material |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57170820A true JPS57170820A (en) | 1982-10-21 |
| JPS635327B2 JPS635327B2 (enrdf_load_stackoverflow) | 1988-02-03 |
Family
ID=13053668
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5736981A Granted JPS57170820A (en) | 1981-04-15 | 1981-04-15 | Manufacture of structural boron material |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57170820A (enrdf_load_stackoverflow) |
-
1981
- 1981-04-15 JP JP5736981A patent/JPS57170820A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS635327B2 (enrdf_load_stackoverflow) | 1988-02-03 |
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