JPS57169086A - Vacuum vapor-depositing device of crystal resonator - Google Patents

Vacuum vapor-depositing device of crystal resonator

Info

Publication number
JPS57169086A
JPS57169086A JP5404981A JP5404981A JPS57169086A JP S57169086 A JPS57169086 A JP S57169086A JP 5404981 A JP5404981 A JP 5404981A JP 5404981 A JP5404981 A JP 5404981A JP S57169086 A JPS57169086 A JP S57169086A
Authority
JP
Japan
Prior art keywords
vapor
saucer
gold
shielding plate
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5404981A
Other languages
English (en)
Japanese (ja)
Other versions
JPH021225B2 (enrdf_load_stackoverflow
Inventor
Toshiki Suganuma
Toshio Hayashi
Yasuo Nomura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nihon Dempa Kogyo Co Ltd
Original Assignee
Nihon Dempa Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Dempa Kogyo Co Ltd filed Critical Nihon Dempa Kogyo Co Ltd
Priority to JP5404981A priority Critical patent/JPS57169086A/ja
Publication of JPS57169086A publication Critical patent/JPS57169086A/ja
Publication of JPH021225B2 publication Critical patent/JPH021225B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP5404981A 1981-04-10 1981-04-10 Vacuum vapor-depositing device of crystal resonator Granted JPS57169086A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5404981A JPS57169086A (en) 1981-04-10 1981-04-10 Vacuum vapor-depositing device of crystal resonator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5404981A JPS57169086A (en) 1981-04-10 1981-04-10 Vacuum vapor-depositing device of crystal resonator

Publications (2)

Publication Number Publication Date
JPS57169086A true JPS57169086A (en) 1982-10-18
JPH021225B2 JPH021225B2 (enrdf_load_stackoverflow) 1990-01-10

Family

ID=12959746

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5404981A Granted JPS57169086A (en) 1981-04-10 1981-04-10 Vacuum vapor-depositing device of crystal resonator

Country Status (1)

Country Link
JP (1) JPS57169086A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH021225B2 (enrdf_load_stackoverflow) 1990-01-10

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