JPS57163853A - Detector for sample surface defect - Google Patents
Detector for sample surface defectInfo
- Publication number
- JPS57163853A JPS57163853A JP4959581A JP4959581A JPS57163853A JP S57163853 A JPS57163853 A JP S57163853A JP 4959581 A JP4959581 A JP 4959581A JP 4959581 A JP4959581 A JP 4959581A JP S57163853 A JPS57163853 A JP S57163853A
- Authority
- JP
- Japan
- Prior art keywords
- laser light
- signal
- mirror
- edge
- signals
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/8901—Optical details; Scanning details
Landscapes
- Engineering & Computer Science (AREA)
- Textile Engineering (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4959581A JPS57163853A (en) | 1981-03-31 | 1981-03-31 | Detector for sample surface defect |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4959581A JPS57163853A (en) | 1981-03-31 | 1981-03-31 | Detector for sample surface defect |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57163853A true JPS57163853A (en) | 1982-10-08 |
Family
ID=12835581
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4959581A Pending JPS57163853A (en) | 1981-03-31 | 1981-03-31 | Detector for sample surface defect |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57163853A (ja) |
-
1981
- 1981-03-31 JP JP4959581A patent/JPS57163853A/ja active Pending
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