JPS57161066A - Removing method for metallic oxide film - Google Patents
Removing method for metallic oxide filmInfo
- Publication number
- JPS57161066A JPS57161066A JP4663381A JP4663381A JPS57161066A JP S57161066 A JPS57161066 A JP S57161066A JP 4663381 A JP4663381 A JP 4663381A JP 4663381 A JP4663381 A JP 4663381A JP S57161066 A JPS57161066 A JP S57161066A
- Authority
- JP
- Japan
- Prior art keywords
- stuck
- metallic oxide
- films
- substrate
- oxide film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910044991 metal oxide Inorganic materials 0.000 title abstract 4
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 abstract 4
- 239000000758 substrate Substances 0.000 abstract 4
- 229910052804 chromium Inorganic materials 0.000 abstract 2
- 229910052742 iron Inorganic materials 0.000 abstract 2
- 239000000843 powder Substances 0.000 abstract 2
- 229910052802 copper Inorganic materials 0.000 abstract 1
- 229910052748 manganese Inorganic materials 0.000 abstract 1
- 229910052759 nickel Inorganic materials 0.000 abstract 1
- 229910052725 zinc Inorganic materials 0.000 abstract 1
Landscapes
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4663381A JPS57161066A (en) | 1981-03-30 | 1981-03-30 | Removing method for metallic oxide film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4663381A JPS57161066A (en) | 1981-03-30 | 1981-03-30 | Removing method for metallic oxide film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57161066A true JPS57161066A (en) | 1982-10-04 |
| JPS6332868B2 JPS6332868B2 (enExample) | 1988-07-01 |
Family
ID=12752692
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4663381A Granted JPS57161066A (en) | 1981-03-30 | 1981-03-30 | Removing method for metallic oxide film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57161066A (enExample) |
-
1981
- 1981-03-30 JP JP4663381A patent/JPS57161066A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6332868B2 (enExample) | 1988-07-01 |
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