JPS57159821A - Production of photopolymer - Google Patents

Production of photopolymer

Info

Publication number
JPS57159821A
JPS57159821A JP4561481A JP4561481A JPS57159821A JP S57159821 A JPS57159821 A JP S57159821A JP 4561481 A JP4561481 A JP 4561481A JP 4561481 A JP4561481 A JP 4561481A JP S57159821 A JPS57159821 A JP S57159821A
Authority
JP
Japan
Prior art keywords
polymer
photopolymer
ultrafilter
filtrate
narrow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4561481A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6324521B2 (enrdf_load_stackoverflow
Inventor
Yasutaka Ban
Nobuo Fujie
Hiroyuki Baba
Kazuo Toda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP4561481A priority Critical patent/JPS57159821A/ja
Publication of JPS57159821A publication Critical patent/JPS57159821A/ja
Publication of JPS6324521B2 publication Critical patent/JPS6324521B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Other Resins Obtained By Reactions Not Involving Carbon-To-Carbon Unsaturated Bonds (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Polymerisation Methods In General (AREA)
JP4561481A 1981-03-30 1981-03-30 Production of photopolymer Granted JPS57159821A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4561481A JPS57159821A (en) 1981-03-30 1981-03-30 Production of photopolymer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4561481A JPS57159821A (en) 1981-03-30 1981-03-30 Production of photopolymer

Publications (2)

Publication Number Publication Date
JPS57159821A true JPS57159821A (en) 1982-10-02
JPS6324521B2 JPS6324521B2 (enrdf_load_stackoverflow) 1988-05-20

Family

ID=12724246

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4561481A Granted JPS57159821A (en) 1981-03-30 1981-03-30 Production of photopolymer

Country Status (1)

Country Link
JP (1) JPS57159821A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60243105A (ja) * 1984-05-17 1985-12-03 Osaka Soda Co Ltd ジアリルフタレ−ト系重合体の製法
EP0558102A3 (en) * 1991-12-27 1994-11-02 Sumitomo Chemical Co Resist composition and process for producing the same
EP1044394A4 (en) * 1998-01-16 2001-04-04 Olin Microelectronic Chem Inc METHOD FOR PRODUCING A RADIO-SENSITIVE COMPOSITION
WO2009063726A1 (ja) * 2007-11-12 2009-05-22 Jsr Corporation フォトレジスト用樹脂の製造方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60243105A (ja) * 1984-05-17 1985-12-03 Osaka Soda Co Ltd ジアリルフタレ−ト系重合体の製法
EP0558102A3 (en) * 1991-12-27 1994-11-02 Sumitomo Chemical Co Resist composition and process for producing the same
EP1044394A4 (en) * 1998-01-16 2001-04-04 Olin Microelectronic Chem Inc METHOD FOR PRODUCING A RADIO-SENSITIVE COMPOSITION
WO2009063726A1 (ja) * 2007-11-12 2009-05-22 Jsr Corporation フォトレジスト用樹脂の製造方法

Also Published As

Publication number Publication date
JPS6324521B2 (enrdf_load_stackoverflow) 1988-05-20

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