JPS56161802A - Filtering treatment method - Google Patents
Filtering treatment methodInfo
- Publication number
- JPS56161802A JPS56161802A JP6481380A JP6481380A JPS56161802A JP S56161802 A JPS56161802 A JP S56161802A JP 6481380 A JP6481380 A JP 6481380A JP 6481380 A JP6481380 A JP 6481380A JP S56161802 A JPS56161802 A JP S56161802A
- Authority
- JP
- Japan
- Prior art keywords
- water
- filtering treatment
- subjected
- filtered
- returned
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Separation Using Semi-Permeable Membranes (AREA)
Abstract
PURPOSE: To obtain filtered water with good quality used in a semiconductor industry or the like at a high yield by a method wherein water to be treated is subjected to the filtering treatment densely at first and concentrated water not filtered is subjected to the filtering treatment roughly and, thereafter, returned to the first process.
CONSTITUTION: The water 4 to be treated pressurized by a pump P from a raw water tank T is supplied under pressure to an ultrafiltration device UF to be separated into the filtered water 5 and the unfiltered concentrated water 6. The concentrated water 6 is passed through a filter device F having a filter pore size larger than that of the ultrafiltration device UF to be subjected to the filtering treatment and, thereafter, returned to the raw water tank T. By this method, a large amount of ultrapure water can be prepared at a low cost.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6481380A JPS56161802A (en) | 1980-05-16 | 1980-05-16 | Filtering treatment method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6481380A JPS56161802A (en) | 1980-05-16 | 1980-05-16 | Filtering treatment method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS56161802A true JPS56161802A (en) | 1981-12-12 |
Family
ID=13269052
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6481380A Pending JPS56161802A (en) | 1980-05-16 | 1980-05-16 | Filtering treatment method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56161802A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6090007A (en) * | 1983-10-24 | 1985-05-21 | Arubatsuku Service Kk | Filter apparatus |
JPS6211507A (en) * | 1985-07-09 | 1987-01-20 | Mitsubishi Rayon Eng Co Ltd | Treatment of suspended matters in water and treating device therefor |
-
1980
- 1980-05-16 JP JP6481380A patent/JPS56161802A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6090007A (en) * | 1983-10-24 | 1985-05-21 | Arubatsuku Service Kk | Filter apparatus |
JPS6211507A (en) * | 1985-07-09 | 1987-01-20 | Mitsubishi Rayon Eng Co Ltd | Treatment of suspended matters in water and treating device therefor |
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