JPS57159077A - Manufacture of semiconductor laser - Google Patents

Manufacture of semiconductor laser

Info

Publication number
JPS57159077A
JPS57159077A JP4363781A JP4363781A JPS57159077A JP S57159077 A JPS57159077 A JP S57159077A JP 4363781 A JP4363781 A JP 4363781A JP 4363781 A JP4363781 A JP 4363781A JP S57159077 A JPS57159077 A JP S57159077A
Authority
JP
Japan
Prior art keywords
semiconductor layer
inp
light
semiconductor
semiconductor laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4363781A
Other languages
Japanese (ja)
Inventor
Sadao Adachi
Hitoshi Kawaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP4363781A priority Critical patent/JPS57159077A/en
Publication of JPS57159077A publication Critical patent/JPS57159077A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
    • H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure

Landscapes

  • Weting (AREA)
  • Semiconductor Lasers (AREA)

Abstract

PURPOSE:To obtain the integrated circuit device having a semiconductor laser formed on a substrate together with a photo waveguide passage, a light modulator and a light-detecting device by a method wherein a chemical etching process is performed on the laminated material consisting of the semiconductor whereon a semiconductor layer was laminated. CONSTITUTION:A mask layer 16 is coated on the laminated material A which was formed by successively laminating an InP semiconductor layer 11, an InGaAsP semiconductor layer 12, an InP semiconductor layer 13 and an InGaAsP semiconductor layer 14 on an InP substrate 10, and an etching process is performed on the above. A semiconductor layer U, one side face of which is located on the common surface 17 which is used as the reflecting surface of Fabry-Perot and the other side face is located on the common face 18 which will be used as the reflecting surface of Fabry-Perot which is parallel with the common surface 17, is obtained. As a result, an integrated circuit device, having the semiconductor layer formed on the substrate together with the photo waveguide passage, the light modulator and the light-detecting device, can be obtained.
JP4363781A 1981-03-25 1981-03-25 Manufacture of semiconductor laser Pending JPS57159077A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4363781A JPS57159077A (en) 1981-03-25 1981-03-25 Manufacture of semiconductor laser

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4363781A JPS57159077A (en) 1981-03-25 1981-03-25 Manufacture of semiconductor laser

Publications (1)

Publication Number Publication Date
JPS57159077A true JPS57159077A (en) 1982-10-01

Family

ID=12669374

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4363781A Pending JPS57159077A (en) 1981-03-25 1981-03-25 Manufacture of semiconductor laser

Country Status (1)

Country Link
JP (1) JPS57159077A (en)

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