JPS57156523A - Hot wire type flow rate sensor - Google Patents
Hot wire type flow rate sensorInfo
- Publication number
- JPS57156523A JPS57156523A JP56040349A JP4034981A JPS57156523A JP S57156523 A JPS57156523 A JP S57156523A JP 56040349 A JP56040349 A JP 56040349A JP 4034981 A JP4034981 A JP 4034981A JP S57156523 A JPS57156523 A JP S57156523A
- Authority
- JP
- Japan
- Prior art keywords
- film
- insulating film
- hot wire
- resistance body
- flow rate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000001681 protective effect Effects 0.000 abstract 3
- 239000000919 ceramic Substances 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 229910001220 stainless steel Inorganic materials 0.000 abstract 1
- 239000010935 stainless steel Substances 0.000 abstract 1
- 238000004804 winding Methods 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Volume Flow (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56040349A JPS57156523A (en) | 1981-03-23 | 1981-03-23 | Hot wire type flow rate sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56040349A JPS57156523A (en) | 1981-03-23 | 1981-03-23 | Hot wire type flow rate sensor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57156523A true JPS57156523A (en) | 1982-09-27 |
JPH0237528B2 JPH0237528B2 (enrdf_load_stackoverflow) | 1990-08-24 |
Family
ID=12578154
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56040349A Granted JPS57156523A (en) | 1981-03-23 | 1981-03-23 | Hot wire type flow rate sensor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57156523A (enrdf_load_stackoverflow) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59151020A (ja) * | 1983-02-18 | 1984-08-29 | Hitachi Ltd | 熱式空気流量計 |
JPS6394120A (ja) * | 1986-10-08 | 1988-04-25 | Hitachi Ltd | 熱線式空気流量計 |
US5367906A (en) * | 1987-09-30 | 1994-11-29 | Hitachi, Ltd. | Hot wire air flow meter |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57149929A (en) * | 1981-03-13 | 1982-09-16 | Hitachi Ltd | Temperature sensor |
-
1981
- 1981-03-23 JP JP56040349A patent/JPS57156523A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57149929A (en) * | 1981-03-13 | 1982-09-16 | Hitachi Ltd | Temperature sensor |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59151020A (ja) * | 1983-02-18 | 1984-08-29 | Hitachi Ltd | 熱式空気流量計 |
JPS6394120A (ja) * | 1986-10-08 | 1988-04-25 | Hitachi Ltd | 熱線式空気流量計 |
US5367906A (en) * | 1987-09-30 | 1994-11-29 | Hitachi, Ltd. | Hot wire air flow meter |
Also Published As
Publication number | Publication date |
---|---|
JPH0237528B2 (enrdf_load_stackoverflow) | 1990-08-24 |
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