JPS57146111A - Optical length measuring device - Google Patents

Optical length measuring device

Info

Publication number
JPS57146111A
JPS57146111A JP3171081A JP3171081A JPS57146111A JP S57146111 A JPS57146111 A JP S57146111A JP 3171081 A JP3171081 A JP 3171081A JP 3171081 A JP3171081 A JP 3171081A JP S57146111 A JPS57146111 A JP S57146111A
Authority
JP
Japan
Prior art keywords
measuring device
differential
length measuring
subscale
gratings
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3171081A
Other languages
Japanese (ja)
Inventor
Sadao Mizuno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP3171081A priority Critical patent/JPS57146111A/en
Publication of JPS57146111A publication Critical patent/JPS57146111A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)

Abstract

PURPOSE:To enable obtaining of a high-precise length measuring device through the reduction in the influence excercised by an error in size precision of grating, by using a differential signal between a first and a third detecting means and between a second and a third detecting means by means of 3 gratings and 3 sets of Moir e detecting means which are mounted to a subscale. CONSTITUTION:A grating 10a is mounted to a main scale 10, and gratings 11a- 11c, having a 90 deg. phase difference, are attached to a subscale 11. Light from power sources 12a-12c forms Moir e, it is detected by collecting elements 14a- 14c, and it is amplified by amplifying circuit 17-19 to apply it to differential amplifying circuits 20 and 21. Differential outputs 23a and 23b between a first and a third output signal and between a second and a third output signal are fetched, and a measurement of a moving direction and legnth is conducted by a conventional method by the use of the differential outputs so fetched. This permits the reduction of an error differential signal due to an error in a size precision of grating to 1/3 compared with a device wherein 4 sets conventional subscale gratings are used, and obtains a length measuring device which is excellent in resolution and has a high precision.
JP3171081A 1981-03-04 1981-03-04 Optical length measuring device Pending JPS57146111A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3171081A JPS57146111A (en) 1981-03-04 1981-03-04 Optical length measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3171081A JPS57146111A (en) 1981-03-04 1981-03-04 Optical length measuring device

Publications (1)

Publication Number Publication Date
JPS57146111A true JPS57146111A (en) 1982-09-09

Family

ID=12338624

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3171081A Pending JPS57146111A (en) 1981-03-04 1981-03-04 Optical length measuring device

Country Status (1)

Country Link
JP (1) JPS57146111A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01265116A (en) * 1988-04-15 1989-10-23 Mitsutoyo Corp Photoelectric displacement detector
WO1990008942A1 (en) * 1989-01-25 1990-08-09 Fanuc Ltd Optical encoder
JPH03128419A (en) * 1989-10-13 1991-05-31 Yamatake Honeywell Co Ltd Encoder
WO2013026266A1 (en) * 2011-08-23 2013-02-28 广州市诺信数字测控设备有限公司 Double light source grating ruler

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01265116A (en) * 1988-04-15 1989-10-23 Mitsutoyo Corp Photoelectric displacement detector
WO1990008942A1 (en) * 1989-01-25 1990-08-09 Fanuc Ltd Optical encoder
JPH03128419A (en) * 1989-10-13 1991-05-31 Yamatake Honeywell Co Ltd Encoder
WO2013026266A1 (en) * 2011-08-23 2013-02-28 广州市诺信数字测控设备有限公司 Double light source grating ruler

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