JPS57140870A - Controlling apparatus for concentration of plating solution - Google Patents

Controlling apparatus for concentration of plating solution

Info

Publication number
JPS57140870A
JPS57140870A JP17942181A JP17942181A JPS57140870A JP S57140870 A JPS57140870 A JP S57140870A JP 17942181 A JP17942181 A JP 17942181A JP 17942181 A JP17942181 A JP 17942181A JP S57140870 A JPS57140870 A JP S57140870A
Authority
JP
Japan
Prior art keywords
section
plating
concn
soln
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17942181A
Other languages
English (en)
Japanese (ja)
Other versions
JPH042670B2 (cg-RX-API-DMAC7.html
Inventor
Hiroshi Kumasaka
Yoshihide Kamei
Susumu Seki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP17942181A priority Critical patent/JPS57140870A/ja
Publication of JPS57140870A publication Critical patent/JPS57140870A/ja
Publication of JPH042670B2 publication Critical patent/JPH042670B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemically Coating (AREA)
JP17942181A 1981-11-09 1981-11-09 Controlling apparatus for concentration of plating solution Granted JPS57140870A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17942181A JPS57140870A (en) 1981-11-09 1981-11-09 Controlling apparatus for concentration of plating solution

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17942181A JPS57140870A (en) 1981-11-09 1981-11-09 Controlling apparatus for concentration of plating solution

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP7422177A Division JPS548120A (en) 1977-06-21 1977-06-21 Controller for concentration of plating bath

Publications (2)

Publication Number Publication Date
JPS57140870A true JPS57140870A (en) 1982-08-31
JPH042670B2 JPH042670B2 (cg-RX-API-DMAC7.html) 1992-01-20

Family

ID=16065567

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17942181A Granted JPS57140870A (en) 1981-11-09 1981-11-09 Controlling apparatus for concentration of plating solution

Country Status (1)

Country Link
JP (1) JPS57140870A (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59161895A (ja) * 1983-03-07 1984-09-12 株式会社　プランテツクス プリント基板のスルーホールメッキ装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2497440C (en) * 2002-09-04 2011-03-22 Schering Corporation Pyrazolopyrimidines as cyclin-dependent kinase inhibitors

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5274224A (en) * 1975-12-17 1977-06-22 Hitachi Ltd Pick up tube

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5274224A (en) * 1975-12-17 1977-06-22 Hitachi Ltd Pick up tube

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59161895A (ja) * 1983-03-07 1984-09-12 株式会社　プランテツクス プリント基板のスルーホールメッキ装置

Also Published As

Publication number Publication date
JPH042670B2 (cg-RX-API-DMAC7.html) 1992-01-20

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