JPS57140602A - Apparatus for distilling liquid - Google Patents
Apparatus for distilling liquidInfo
- Publication number
- JPS57140602A JPS57140602A JP2616681A JP2616681A JPS57140602A JP S57140602 A JPS57140602 A JP S57140602A JP 2616681 A JP2616681 A JP 2616681A JP 2616681 A JP2616681 A JP 2616681A JP S57140602 A JPS57140602 A JP S57140602A
- Authority
- JP
- Japan
- Prior art keywords
- air
- fine particles
- vapor
- air filter
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Abstract
PURPOSE: To prepare a high purity liquid so as to be required from an ultra- LSI manufacturing industry by condensing the vapor passing through a filter paper.
CONSTITUTION: At first, a liquid 24 containing a predetermined amount of impure fine particles is poured into a heating tank 1 from a liquid supply pipe 2 and, after pouring, air is introduced thereinto from an air supply pipe 4 under pressure to flow dustless air through an air filter paper and impure fine particles such as dust present in air within a liquid receiving tank 17 from an air filter tank 6 and impure fine particles adhered to wall surfaces of each parts are removed. After this process, the heat source 22 of the air filter tank 6 is operated so as to be capable of preventing the condensation of vapor in the air filter paper 7 and, thereafter, the heat source 21 of the heating tank 1 is operated. By this method, the vapor of the liquid 24 and the impure fine particles 25 accompanied therewith are entered into the air filter tank 6. By this treatment, almost all of impure fine particles in the vapor are removed by the air filter paper 7 and only the vapor is condensed in a condenser 9 and the resulting condensate is accumulated in the liquid receiving tank 17.
COPYRIGHT: (C)1982,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2616681A JPS57140602A (en) | 1981-02-26 | 1981-02-26 | Apparatus for distilling liquid |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2616681A JPS57140602A (en) | 1981-02-26 | 1981-02-26 | Apparatus for distilling liquid |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57140602A true JPS57140602A (en) | 1982-08-31 |
Family
ID=12185955
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2616681A Pending JPS57140602A (en) | 1981-02-26 | 1981-02-26 | Apparatus for distilling liquid |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57140602A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61163002U (en) * | 1985-03-29 | 1986-10-09 | ||
JPS63185401A (en) * | 1987-01-27 | 1988-08-01 | 多摩化学工業株式会社 | Method and apparatus for producing high purity chemicals |
JPH01274801A (en) * | 1988-04-27 | 1989-11-02 | Nitta Gelatin Inc | Method for purifying organic solvent |
-
1981
- 1981-02-26 JP JP2616681A patent/JPS57140602A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61163002U (en) * | 1985-03-29 | 1986-10-09 | ||
JPS63185401A (en) * | 1987-01-27 | 1988-08-01 | 多摩化学工業株式会社 | Method and apparatus for producing high purity chemicals |
JPH01274801A (en) * | 1988-04-27 | 1989-11-02 | Nitta Gelatin Inc | Method for purifying organic solvent |
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