JPS57139042A - Preparation of metal-free organic alkali solution - Google Patents

Preparation of metal-free organic alkali solution

Info

Publication number
JPS57139042A
JPS57139042A JP2477581A JP2477581A JPS57139042A JP S57139042 A JPS57139042 A JP S57139042A JP 2477581 A JP2477581 A JP 2477581A JP 2477581 A JP2477581 A JP 2477581A JP S57139042 A JPS57139042 A JP S57139042A
Authority
JP
Japan
Prior art keywords
ion exchange
organic alkali
exchange resin
precipitate
weakly acidic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2477581A
Other languages
Japanese (ja)
Other versions
JPS6222978B2 (en
Inventor
Ichiro Ichikawa
Masaaki Takenaka
Kenji Niwa
Koichi Arai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Chemical Co Ltd
Original Assignee
Sumitomo Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Chemical Co Ltd filed Critical Sumitomo Chemical Co Ltd
Priority to JP2477581A priority Critical patent/JPS57139042A/en
Publication of JPS57139042A publication Critical patent/JPS57139042A/en
Publication of JPS6222978B2 publication Critical patent/JPS6222978B2/ja
Granted legal-status Critical Current

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  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)

Abstract

PURPOSE: To prepare the titled substance useful as a developing solution for a positive resist, economically, in high efficiency, by selectively removing the trace metallic ions dissolved in an organic alkali solution with a weakly acidic ion exchange resin composed of a polyacrylic gel.
CONSTITUTION: A tetraalkylammonium chloride is made to react with an alkaline agent such as Na2CO3, K2CO3, etc. in an alcohol solution to obtain a quaternary ammonium hydroxide of formula (R1WR4 are alkyl etc.) and NaCl or KCl as precipitate. A major part of the alkali metal is removed by separating the precipitate by filtration, etc., the trace metallic ions are selectively removed by the use of a weakly acidic ion exchange resin composed of a polyacrylic gel.
EFFECT: The content of the metallic ion can be reduced to ≤1ppm, and the discoloration and color-development with time can be prevented. Since the necessary amount of the ion exchange resin is small and the resin can be used for a long period without regeneration, the loss of the organic alkali can be suppressed to a low level.
COPYRIGHT: (C)1982,JPO&Japio
JP2477581A 1981-02-20 1981-02-20 Preparation of metal-free organic alkali solution Granted JPS57139042A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2477581A JPS57139042A (en) 1981-02-20 1981-02-20 Preparation of metal-free organic alkali solution

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2477581A JPS57139042A (en) 1981-02-20 1981-02-20 Preparation of metal-free organic alkali solution

Publications (2)

Publication Number Publication Date
JPS57139042A true JPS57139042A (en) 1982-08-27
JPS6222978B2 JPS6222978B2 (en) 1987-05-20

Family

ID=12147542

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2477581A Granted JPS57139042A (en) 1981-02-20 1981-02-20 Preparation of metal-free organic alkali solution

Country Status (1)

Country Link
JP (1) JPS57139042A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998003466A1 (en) * 1996-07-23 1998-01-29 Tokuyama Corporation Process for the preparation of aqueous solutions of tetraalkylammonium hydroxides
CN112999694A (en) * 2021-03-24 2021-06-22 沧州信联化工有限公司 Raw material refining device for processing tetramethylammonium hydroxide and use method thereof
JP2021116236A (en) * 2020-01-22 2021-08-10 株式会社トクヤマ Production method for low-water-content quaternary ammonium hydroxide solution

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998003466A1 (en) * 1996-07-23 1998-01-29 Tokuyama Corporation Process for the preparation of aqueous solutions of tetraalkylammonium hydroxides
US5929280A (en) * 1996-07-23 1999-07-27 Tokuyama Corporation Process for the preparation of aqueous solutions of tetraalkylammonium hydroxides
JP2021116236A (en) * 2020-01-22 2021-08-10 株式会社トクヤマ Production method for low-water-content quaternary ammonium hydroxide solution
CN112999694A (en) * 2021-03-24 2021-06-22 沧州信联化工有限公司 Raw material refining device for processing tetramethylammonium hydroxide and use method thereof

Also Published As

Publication number Publication date
JPS6222978B2 (en) 1987-05-20

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