JPS57138613A - Spectromicroscope - Google Patents

Spectromicroscope

Info

Publication number
JPS57138613A
JPS57138613A JP56023861A JP2386181A JPS57138613A JP S57138613 A JPS57138613 A JP S57138613A JP 56023861 A JP56023861 A JP 56023861A JP 2386181 A JP2386181 A JP 2386181A JP S57138613 A JPS57138613 A JP S57138613A
Authority
JP
Japan
Prior art keywords
rays
inexpensive
sized
moving mechanism
ray detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56023861A
Other languages
Japanese (ja)
Inventor
Shigeru Yasuami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP56023861A priority Critical patent/JPS57138613A/en
Publication of JPS57138613A publication Critical patent/JPS57138613A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/06—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption
    • G01N23/083—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption the radiation being X-rays

Abstract

PURPOSE:To make the device small-sized and inexpensive, by condensing X rays, which transmit through a sample arranged on the transmission hole of a shielding plate, to an X-ray detector through a Fresnel zone plate and a screen provided with a movable pin hole. CONSTITUTION:X rays (synchrotron radiation light) transmitted through a sample 2 arranged on a transmission hole 1a of a shielding plate 1 pass through a Fresnel zone plate 3 and are condensed to a screen 5 on a moving mechanism 6 and are detected through a pin hole 5a by an X-ray detector 4. The moving mechanism 6 is moved along the axis to obtain a continuous spectrum for the wavelength. Thus, the device becomes small-sized and inexpensive.
JP56023861A 1981-02-20 1981-02-20 Spectromicroscope Pending JPS57138613A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56023861A JPS57138613A (en) 1981-02-20 1981-02-20 Spectromicroscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56023861A JPS57138613A (en) 1981-02-20 1981-02-20 Spectromicroscope

Publications (1)

Publication Number Publication Date
JPS57138613A true JPS57138613A (en) 1982-08-27

Family

ID=12122217

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56023861A Pending JPS57138613A (en) 1981-02-20 1981-02-20 Spectromicroscope

Country Status (1)

Country Link
JP (1) JPS57138613A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1987000644A1 (en) * 1985-07-19 1987-01-29 Shimadzu Corporation Soft x-ray lithographic system
JPS63103954A (en) * 1986-10-21 1988-05-09 Nec Corp High-sensitivity fluorescent x-ray gas analyzer
JPH063294A (en) * 1992-06-22 1994-01-11 Nippon Telegr & Teleph Corp <Ntt> Fluorescent x-ray spectral device
JP2021512338A (en) * 2018-01-26 2021-05-13 コーリー、ジェッド Micro wideband spectroscopic analyzer

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1987000644A1 (en) * 1985-07-19 1987-01-29 Shimadzu Corporation Soft x-ray lithographic system
JPS63103954A (en) * 1986-10-21 1988-05-09 Nec Corp High-sensitivity fluorescent x-ray gas analyzer
JPH063294A (en) * 1992-06-22 1994-01-11 Nippon Telegr & Teleph Corp <Ntt> Fluorescent x-ray spectral device
JP2021512338A (en) * 2018-01-26 2021-05-13 コーリー、ジェッド Micro wideband spectroscopic analyzer

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