JPS57137836A - Leakage detector - Google Patents

Leakage detector

Info

Publication number
JPS57137836A
JPS57137836A JP2311581A JP2311581A JPS57137836A JP S57137836 A JPS57137836 A JP S57137836A JP 2311581 A JP2311581 A JP 2311581A JP 2311581 A JP2311581 A JP 2311581A JP S57137836 A JPS57137836 A JP S57137836A
Authority
JP
Japan
Prior art keywords
foam
liquid
product
detecting
acoustic emission
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2311581A
Other languages
Japanese (ja)
Inventor
Tamotsu Usami
Kanji Otsuka
Takashi Miwa
Toshihiro Tsuboi
Shuichi Sugimoto
Takashi Araki
Mutsuo Fuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NITSUKAN DENSHI KK
Hitachi Microcomputer System Ltd
Hitachi Ltd
Original Assignee
NITSUKAN DENSHI KK
Hitachi Ltd
Hitachi Microcomputer Engineering Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NITSUKAN DENSHI KK, Hitachi Ltd, Hitachi Microcomputer Engineering Ltd filed Critical NITSUKAN DENSHI KK
Priority to JP2311581A priority Critical patent/JPS57137836A/en
Publication of JPS57137836A publication Critical patent/JPS57137836A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/06—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point by observing bubbles in a liquid pool
    • G01M3/10—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point by observing bubbles in a liquid pool for containers, e.g. radiators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/24—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using infrasonic, sonic, or ultrasonic vibrations

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To perform leakage detection of good accuracy automatically by detecting the acoustic emission generated by the fluid leaking from products to be examined. CONSTITUTION:A semiconductor product 10 is kept sunk in the liquid 14 in a detecting vessel 12. The liquid 14 is high temp. liquid to accelerate the generation of foam from the product 10. A heater, and a temp. controller are built in a control part 12A in the lower part. A sensor 18 for detecting the acoustic emission generated by the foam 16 produced in the liquid 14 from the cavities in the product 10 is fitted on the outside wall surface in the upper part of the vessel 12. When the foam 16 leaks from the cavities in the product 10, the acoustic emission generated by the foam 16 is surely detected by the sensor 18, and is measured and displayed by a measuring device 20.
JP2311581A 1981-02-20 1981-02-20 Leakage detector Pending JPS57137836A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2311581A JPS57137836A (en) 1981-02-20 1981-02-20 Leakage detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2311581A JPS57137836A (en) 1981-02-20 1981-02-20 Leakage detector

Publications (1)

Publication Number Publication Date
JPS57137836A true JPS57137836A (en) 1982-08-25

Family

ID=12101480

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2311581A Pending JPS57137836A (en) 1981-02-20 1981-02-20 Leakage detector

Country Status (1)

Country Link
JP (1) JPS57137836A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5977329A (en) * 1982-10-25 1984-05-02 Mitsubishi Electric Corp Automatic gross leak testing device
EP0390232A2 (en) * 1989-02-07 1990-10-03 Wubs Technologie B.V. Process for checking the tightness of a casing, and device for carrying out said process

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5977329A (en) * 1982-10-25 1984-05-02 Mitsubishi Electric Corp Automatic gross leak testing device
EP0390232A2 (en) * 1989-02-07 1990-10-03 Wubs Technologie B.V. Process for checking the tightness of a casing, and device for carrying out said process

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