JPS5977329A - Automatic gross leak testing device - Google Patents

Abstract

PURPOSE:To enhance detecting sensitivity and to make it possible to judge many articles to be tested simultaneously, by providing an ultrasonic wave source and an intensity meter for every article to be tested, utilizing the characteristics of refraction and reflection of ultrasonic waves passing bubbles, and checking the presence or absence of the yield of bubbles. CONSTITUTION:In a tank 1 containing an inactive liquid 2, an ultrasonic wave source 10 and an ultrasonic wave intensity measuring element 11 are provided as a set for every article to be tested 4. At first, many articles to be tested 4 are immersed in the inactive liquid 2, which is heated by a heater 3 in advance, at the same time. Then, the ultrasonic wave source 10 generates an ultrasonic wave. The intensity of the reflected ultrasonic wave from an ultrasonic wave reflecting plate 7, which is provided in the tank 1, is measured by the ultrasonic wave intensity measuring element 11. Thus bubbles 5, which are yielded from the position of each article to be tested 4, are detected. The measured result is displayed on a monitor panel 12.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an automatic evaluation device for airtightness testing of semiconductor hollow packages.

Conventionally, there has been a device of this type as shown in FIG.

In this figure, 1 is a test tank, 2 is an inert liquid (fluorine-based), 3 is a heater that heats the inert liquid 2, 4 is a product to be tested such as a semiconductor device, and 5 is a bubble generated from a defective product. 6 is liquid ■.

During the test, a large number of test items 4 (two in the illustrated example) are immersed in these pre-heated inert liquids 2, and the presence or absence of bubbles 50 is visually inspected.
Determine whether or not the airtightness of the product under test 4 is good or bad.

In the conventional apparatus described above, a large number of test objects 4 are immersed in the inert liquid 2 at the same time, and the degree of bubble generation from each test object 4 is observed with the human eye to make a judgment. This method has drawbacks such as poor time and accuracy, and sometimes false judgments.

In order to eliminate the above-mentioned drawbacks, this invention has changed from the method of visually inspecting the presence or absence of bubbles to the method in which an ultrasonic source and an intensity meter are provided for each product under test to detect ultrasonic waves passing through bubbles. The detection sensitivity is increased by using the refraction and reflection characteristics of
Furthermore, it is an object of the present invention to provide an automatic gross leak testing device capable of accurately determining a large number of test objects at the same time. This invention will be explained below.

FIG. 2 is a sectional view showing a schematic configuration of an embodiment of the present invention;
FIG. 3 is a sectional view taken along line X-X#+ of the four examples shown in FIG.

In FIGS. 2 and 3, 1 to 6 represent the reflected waves as shown in FIG. 1, and 9 represents the refracted wave due to the bubble 5. 1
0 is an ultrasonic source, and 11 is an element for measuring ultrasonic intensity, through which ultrasonic waves generated from the test article 4 that have crossed the bubble 50 path are incident, and the intensity thereof is measured. 12 is each device,
This is a monitor panel that informs you of the presence or absence of air bubbles 5. and,
The ultrasonic source 10 and the ultrasonic intensity measuring element 11 are provided as a set for each product under test 4.

Next, the operation will be explained. First, by measuring a preheated inert liquid on a large number of test items 4 at the same time using the ultrasonic intensity measuring element 11, bubbles 5 generated from the position of each test item 4 can be accurately and shortened. It is detected by the time and displayed on the monitor/wall 12. In this case, if there is a bubble 5, the ultrasonic wave is refracted and reflected, so it is incident on the ultrasonic intensity measuring element 11 compared to when there is no bubble 5. Since the ultrasonic waves become weaker, it is possible to automatically detect whether or not the bubbles 50 are generated.

As explained above, the present invention provides an ultrasonic source and an element for measuring ultrasonic intensity to detect air bubbles as gross leak defects through conventional visual inspection, and detects the refraction and reflection properties of ultrasonic waves passing through air bubbles. Since 5VC was used to automatically detect air bubbles with high trade detection sensitivity, it has the effect of being able to accurately judge a large number of products to be tested at the same time in a short time.

[Brief explanation of drawings]

FIG. 1 is a schematic cross-sectional view showing a conventional gross leak test apparatus for semiconductor devices, FIG. 2 is a cross-sectional view showing a schematic configuration of an embodiment of the present invention, and FIG. 3 is a cross-sectional view taken along the line It is a diagram. In the figure, 1 is a test tank, 2 is an inert liquid, 3 is a heating refraction wave,
10 is an ultrasonic source, 11 is an ultrasonic intensity measuring element, and 12 is a large number of monitor panels. Note that the same reference numerals in the figures indicate the same or corresponding parts. Agent Nobuo Nobu - (1 other person)

Claims (1)

[Claims] In a device that performs an airtightness test based on the presence or absence of bubbles by dissolving multiple test items in a heated inert liquid,
An ultrasonic wave source and an ultrasonic intensity measuring element that makes the ultrasonic waves from the ultrasonic source enter across the path of bubbles generated from the test object are provided for each of the test objects. Automatic gross leak test equipment.