JPS5954936A - Bubble detector - Google Patents
Bubble detectorInfo
- Publication number
- JPS5954936A JPS5954936A JP16411782A JP16411782A JPS5954936A JP S5954936 A JPS5954936 A JP S5954936A JP 16411782 A JP16411782 A JP 16411782A JP 16411782 A JP16411782 A JP 16411782A JP S5954936 A JPS5954936 A JP S5954936A
- Authority
- JP
- Japan
- Prior art keywords
- bubble
- laser beam
- light
- liquid
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/06—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point by observing bubbles in a liquid pool
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Examining Or Testing Airtightness (AREA)
Abstract
Description
【発明の詳細な説明】
□この発明は、例えば流体の容器類等の漏洩検査を1動
□的に実施するのに利用できる気泡検出装置行に−する
ものであ机
従来この種の漏洩検査は通常検査すべき品物を水中に沈
めて気泡の発生番見て行なわjてきた。DETAILED DESCRIPTION OF THE INVENTION The present invention is directed to a bubble detection device that can be used to perform one-time leak inspection of, for example, fluid containers. Usually, the item to be inspected is submerged in water and the number of bubbles is observed.
しかしこめ方法では自動化−6i困難であ□るので、例
えば諸方の減少を感知して漏□洩を自’ tluJ的に
検査する方法が開発されそきたが、この□ようなつう法
ri検出精度が悪< 、’ Mij者の水中検査方法を
実施している所が多いのが実情である。その理由とじて
、例えば今10′□tの容器を水中検査法で検査したと
ころ直径1yrnメ気泡が毎□秒1個発生したとすると
、10秒間の検査+は10個の気泡が発生さn、ること
に雇る。こh−1lO秒で約5立方−の漏れが生じたこ
とになシ明らかに不良であることを音吐している。とこ
ろがこれを圧力の低下で検出しようとしても同じ10秒
間の圧力の低下*1000万分の5左いう程度のも□の
でとてもこの時間での検出は不可能ヤあ:る。However, it is difficult to automate this method, so for example, methods have been developed to automatically detect leaks by detecting the decrease in various components. The reality is that many places are using Mij's underwater testing method, which has poor accuracy. The reason for this is, for example, if a 10'□t container was inspected using the underwater inspection method, one bubble with a diameter of 1 yrn was generated every □second, then a 10 second inspection + would generate 10 bubbles. , especially to hire. The fact that about 5 cubic meters of leakage occurred in 110 seconds clearly indicates that there is a problem. However, even if we try to detect this as a pressure drop, the pressure drop in the same 10 seconds is only 5/10 million, so it is impossible to detect it in this amount of time.
′−17)、l:う′/″泰中″′?″ネ泡′よる漏洩
検査!そ:、、’:’l 、l”精度の点で十分満足で
きるが、自動化が困難であるという欠点がある。
・・′1::1□11
そこでこの発明は十分1!U定、一度、を維持ししかも
漏洩検査の自動化を容易に達成できる気泡検出装置を提
供することにある二イな、わち、この発明□により、げ
、レーザー1ニムを□用いて透明な液体(例え□ば水)
中にレーザービームの水平の幕を形成し、この幕に向っ
て液体中を浮上し”でく□る気油によるレーザービーム
の散乱で生ゝじた変化を光電的に検出し士気泡ア呑在、
その太き式や数′□を検知するように構成握れる。
′1
以下この発明を添付図面を参照湿てさらに平明する。'-17), l:U'/"Yasunaka"'? Leakage test using ``Nebub''! So:,,':'l,l''Although the accuracy is quite satisfactory, it has the disadvantage that it is difficult to automate.
・・'1::1□11 So this invention is 100%! The second objective of this invention is to provide a bubble detection device that maintains a constant U constant and can easily automate leakage inspection. liquid (e.g. water)
A horizontal curtain of laser beam is formed inside the liquid, and changes caused by the scattering of the laser beam by gas and oil floating in the liquid toward this curtain are detected photoelectrically and the bubbles are swallowed. Currently,
It can be configured to detect the thick expression or number '□.
'1 The present invention will now be further clarified with reference to the accompanying drawings.
第1図にはこの発明による装置の一実施例を概略的に示
し、/dレーザー発振器で、このレーザー発振器/から
発生さnたレーザービームはミラーコで反射さn、多角
形ミラー3に照射される。この多角形ミラー3は高速で
回転きれ、従って多角形ミラー3からのレーザービーム
は左右にある角、 度、で振られ、視覚的にけいわゆる
先幕qを形成す、・ベニ・:。FIG. 1 schematically shows an embodiment of the device according to the invention, in which a laser beam is generated from a laser oscillator, is reflected by a mirror beam, and is irradiated onto a polygonal mirror 3. Ru. This polygonal mirror 3 can be rotated at high speed, so that the laser beam from the polygonal mirror 3 is swung at a certain angle to the left and right, visually forming a so-called front curtain q.
る、 sr:r、透明な容器から成する液槽で透明な液
体が1’ 、、 l K :ll=ておシ、この液槽S
の下部には被検査物(all、、え、は容器)6が人、
ねられ、この検五物6.の内部は□大気よシ高圧の気体
が入力、らn、ている。従ってこの被検査物乙に漏れが
あれば気泡が発生子る。また7は集光装置で、多角形ミ
ラー3によって形成さnた広い範囲の光を受け、フォト
トランジスタ等から成る光電装置gへ供給する。
□第2図には別の実施例を示L1□この実施例は第1図
の場合のよう、にV、−ザービームを走査によらずに横
方向で一部1千光1′を雫成す6カ、式であり、第1図
の装置と対応した部分は同じ符夛で示す。この実施例で
はカマボッ形のレンズタが使用きれ、レーザー発振器l
からのレーザービームを水平横力向に拡げて扇形の先幕
t′を形成するようにされる。sr:r, in a liquid tank consisting of a transparent container, the transparent liquid is 1',, l K:ll=teish, this liquid tank S
The object to be inspected (all, , e, is a container) 6 is a person at the bottom of the
6. The interior of the □ is filled with high-pressure gas compared to the atmosphere. Therefore, if there is a leak in this inspected object B, air bubbles will be generated. Further, 7 is a condensing device which receives light from a wide range formed by the polygonal mirror 3 and supplies it to a photoelectric device g consisting of a phototransistor and the like.
□ Fig. 2 shows another embodiment L1 □ In this embodiment, 1,000 light 1' is partially formed in the lateral direction without scanning the V, - laser beam as in the case of Fig. 1. 6, and the parts corresponding to those of the apparatus in FIG. 1 are indicated by the same symbols. In this example, the kamabot-shaped lens star can be used completely, and the laser oscillator l
The laser beam from the front curtain is expanded in the horizontal direction to form a fan-shaped front curtain t'.
上記二つの方式は視覚的に同じように見えるが、第1図
の走査方式ではエネルギー密度は高いが、気泡に接する
時間が瞬間である。しかし電気信号として取シ出す場合
には有利である。、、−力2.第コ図の方式は運動部分
を備えてないので構造が簡単であるが、エネルギーが分
、散されてその蜜、塵が低く、従って光検出部の感度を
高める必敬が些る。The above two methods look visually the same, but in the scanning method of FIG. 1, the energy density is high, but the contact time with the bubble is instantaneous. However, it is advantageous when extracted as an electrical signal. ,,-force 2. The system shown in Figure C has a simple structure because it does not have any moving parts, but the energy is divided and dispersed and the amount of dust and dirt is low, so there is little need to increase the sensitivity of the photodetector.
これによってノイ、ズの、間匙が牛じる場合も、あシ得
る。従っていすカーの15四を使用するか呼、そ、の目
的に応じて選択すべきであシ、−例としで5大型のもの
や気泡の太き1を知シたいなど、高度の要求が壱るもの
には第1図の方式が有利であシ、−力/1)型のものや
或いは要求の少ないもΩに対しては第2図の方式が有利
であると考えら、れる。。This will help you even if noise, noise, or a spoon becomes a problem. Therefore, you should choose whether to use the 154-sized chair or not, depending on the purpose of the call. It is considered that the method shown in FIG. 1 is advantageous for those of the -force/1) type, or the method shown in FIG. 2 for those with less requirements. .
第1図のビーム走査方式も視覚的にq先幕とみなすこと
ができるので、以下両オ式の動作の説明においては両刃
式とも先幕として説明する。Since the beam scanning method shown in FIG. 1 can also be visually regarded as a q-front curtain, in the following explanation of the operation of the double-edge type, both the double-edged type will be explained as the front curtain.
第3図には気泡10が下から上へ先幕q 、 q/を通
過して行く様子を示す。。FIG. 3 shows how the bubble 10 passes through the leading curtains q and q/ from bottom to top. .
第3図の(a)に示すように先幕< 11.、、 、t
′)の下方に気泡IOが接す、ると、レーザービームの
一部は屈折し7て矢印i<で示す方向へ進み5.、そし
て気泡10が上昇して(b)に示すように先幕(ゲ、q
′)のしはルに達すると、矢印//、/、2で示すよう
斜め上刃および下方へ散乱していく。As shown in FIG. 3(a), the first curtain <11. ,, ,t
When the bubble IO comes into contact with the lower part of the laser beam 7, a portion of the laser beam is refracted 7 and proceeds in the direction indicated by the arrow i<5. , and the bubble 10 rises to the front curtain (ge, q) as shown in (b).
′) When the particles reach the hole, they scatter diagonally toward the upper blade and downward as shown by the arrows //, /, and 2.
さらに気泡10が(0)に示すような位置にくると矢印
12で示す散乱光が生じる。従って一一ム進行力向にお
いて気泡IOの重力領域は気泡の上昇に従って嬰暗を呈
することになる。この様子を第ダ図に示す。第q図、け
後方にスクリーンを配Mしてそれにできた光のパターン
を示し2.気泡IOがなければ何も映らないが図示した
ように気泡10が先幕(,11,、、<z’)に達する
と光のノ々ター、ン、が形成される。この変化状態を集
光装置りを介して光電装置gで検出して気泡を検知する
。Furthermore, when the bubble 10 comes to the position shown at (0), scattered light shown by the arrow 12 is generated. Therefore, in the direction of the force of movement of the bubble IO, the gravity region of the bubble IO becomes dark as the bubble rises. This situation is shown in Figure D. Figure q shows the light pattern created by a screen placed behind the screen.2. If there is no bubble IO, nothing will be visible, but as shown in the figure, when the bubble 10 reaches the front curtain (, 11, , <z'), a notation of light is formed. This changing state is detected by a photoelectric device g via a light condensing device to detect bubbles.
第5図には散乱光による検知の方法を示し、上記の光の
ハイーンの検知に用いられる。この場合集牟装置りはレ
ーザービームの直、進通路をはずしてその上方セよび(
またti)下方に配置され(第S図に上方配置の場合を
示す)、直進するビームは黒体13で吸収する。FIG. 5 shows a detection method using scattered light, which is used for the above-mentioned light detection. In this case, the concentrator removes the direct path of the laser beam and directs it upward (
Also, ti) is arranged below (the upper arrangement is shown in Fig. S), and the beam traveling straight is absorbed by the black body 13.
またレーザービーム自体の強弱で検知する場合には第1
図に示すビーム走査方式を用い、て集光装置7にレーザ
ービームの直進通路上に配置される。In addition, when detecting by the strength of the laser beam itself, the first
Using the beam scanning method shown in the figure, the condenser 7 is placed on the straight path of the laser beam.
レーザービームの幕の大きき上被検査物の犬き゛さを考
暉シ、てどの部位からでてくる気泡も検知できるように
決めらj2る。才だビームの太さを任意に1lAl整で
きしかもエネルギー裕度が高い点から光源としてレーザ
ーを使用してきたが、場合によってはその他の光源を使
用することも当然可能である。The large curtain of the laser beam and the sharpness of the object to be inspected are carefully considered to ensure that bubbles coming from any part can be detected. Although a laser has been used as a light source because the beam thickness can be arbitrarily set to 11Al and has a high energy margin, it is of course possible to use other light sources depending on the case.
さらに第2図の実施例においてレーザービームを水平力
向に拡散をせる手段としてカマボッ形のレンズを用いて
いるが、当然ビームを一平面上に拡散できるレンズ系で
あす1.ばいかなるレンズを使用してもよい。Furthermore, in the embodiment shown in FIG. 2, a kamabot-shaped lens is used as a means for diffusing the laser beam in the horizontal force direction, but it is of course a lens system that can diffuse the beam on one plane. Any lens may be used.
第6図はこの発明の応用例を示し、本装陥を工業的に利
用した一例であシ、チェンコンベア等の搬送機に取付け
ら力また各アーム/、+に被←査物isをのせ、順に液
m16.内を移動していくようにされている。液槽/S
は隔板/6./りによって洗浄部/g1沈静部/9およ
び竺出部5に分割さn、ている。洗浄部/gは流水とな
っていて被検査物isの外部に付着している気泡やその
他の異物を除去するよう:に作″昂じ、また沈静部/り
は検出部20への流水の影響を避ける作用をする。Figure 6 shows an example of application of this invention, and is an example of industrial use of this system. , in order, liquid m16. It is designed to move inside. Liquid tank/S
is a partition plate/6. It is divided into a washing section/g1, a settling section/9 and a shaving section 5 by /. The cleaning part/g is a flowing water and is designed to remove air bubbles and other foreign matter adhering to the outside of the object to be inspected, and the settling part/g is a flowing water to the detection part 20. Acts to avoid the effects.
検出部20には透明な窓が設けらt′1、上述の気泡検
出装置が配置さハ、気泡検出を行なう。気泡が検出され
た場合には何等かの方法、例えば気泡の検出された被検
丘物をのせたアーム/4/の番号全記憶し、その後の選
別工程でその彼検査物を除去するようにさn得る。The detection section 20 is provided with a transparent window t'1, and the above-mentioned bubble detection device is arranged to detect bubbles. If air bubbles are detected, use some method, for example, memorize the entire number of the arm /4/ on which the object to be tested on which air bubbles were detected, and remove that object in the subsequent sorting process. get it.
以上説明してきたように、この発明によnば、極めて高
測定精度で簡単に気泡検出を行なうことができ、そして
大規模:′小規模を問わず漏洩検査の自動化装竹として
容易に実施することができ、工業的に極めて翁用なもの
である。As explained above, according to the present invention, bubble detection can be easily performed with extremely high measurement accuracy, and it can be easily implemented as an automated system for leak inspection regardless of whether it is large scale or small scale. It is industrially very suitable for old men.
第/ + −2図はこの発明による気泡検出装置の二つ
の実施例を示す原理図、第3.グ図はh作説明図、第S
図は装tNの変形例を示す概略図、即6腰はこの発明の
応用例を示す概咄図である。
図中、l:レーザー発振器、3:多角形ミラー、ダニ先
幕、S:液槽、7:集光装荷、g:光電装置、ワ:カマ
ボコ形のレンズ。
ワ
見2図
手続補正書(方式)
昭和盛年−月4日
特許庁長官殿
■、事件の表示
昭和57年 特許願 第164,117号2、発明の名
称
気 泡 検 出 装 置
3、補正をする者
事件との関係 特許出願人
住 所 東京都中央区日本橋茅場町二丁目6番8号名
称 三秀プレス工業株式会社
4、代理人
〒105 住所 東京都港区西新橋1丁目1番15号
物産ビル別館 電話(591) 02611、明細書
2、図 面
6゜補正の内容Figures 3 and 3 are principle diagrams showing two embodiments of the bubble detection device according to the present invention. The diagrams are illustrated by H, Part S.
The figure is a schematic diagram showing a modification of the tN, and the figure is a schematic diagram showing an application example of the present invention. In the figure, l: laser oscillator, 3: polygonal mirror, front curtain, S: liquid tank, 7: condensing load, g: photoelectric device, W: semicylindrical lens. Figure 2 Procedural Amendment (Method) Date: Showa era - April 4, Mr. Commissioner of the Patent Office ■, Indication of the case, 1982 Patent Application No. 164,117 2, Title of invention Air bubble detection device 3, Amendment Relationship with the case of a person who does Bussan Building Annex Tel: (591) 02611, Specification 2, Drawing 6° Amendment details
Claims (1)
液槽に水平に照射して水平なレーザ」ビーム基を形成す
る先幕形成□装置と、液槽内の透明な液体中を通過して
きたレーザービームから上記液体中を浮上してくΣ気泡
によるレーザービームめ散乱で生じ2変化を検出する光
電装置とを有し、光電装置の電気的出力信号から気泡の
有無、そ□の大きさおよび数を検知できるように□した
ことを□特徴とする気泡検出装置。″ □ ユ 先幕形成□装置カにレーザー発振器からのレーザ−
ビームを透明な液体中で水平横力向に走査させる回転多
角ミラー装置から成る特許請求の範囲第7項に記載の装
置。 ′ ■3 先幕形成装置がレーザー発振
□器からのレーザービームを水平に拡げるレンズ系から
成る蒔許請求の恥囲第7項に記載の装置。[Claims] l A front curtain forming device that horizontally irradiates a thin laser beam from a laser oscillator onto a transparent liquid tank to form a horizontal laser beam base, and It has a photoelectric device that detects two changes caused by the scattering of the laser beam by Σ bubbles floating in the liquid from the laser beam that has passed through it, and detects the presence or absence of bubbles and their size from the electrical output signal of the photoelectric device. A bubble detection device characterized by being able to detect the size and number of bubbles. ″ □ U Front curtain formation □ Laser from a laser oscillator is applied to the device
8. Apparatus according to claim 7, comprising a rotating polygon mirror arrangement for scanning the beam in a horizontal transverse force direction in a transparent liquid. '(3) The device according to item 7 of the patent application, in which the leading curtain forming device comprises a lens system that horizontally spreads the laser beam from the laser oscillator.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16411782A JPS5954936A (en) | 1982-09-22 | 1982-09-22 | Bubble detector |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16411782A JPS5954936A (en) | 1982-09-22 | 1982-09-22 | Bubble detector |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5954936A true JPS5954936A (en) | 1984-03-29 |
Family
ID=15787069
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16411782A Pending JPS5954936A (en) | 1982-09-22 | 1982-09-22 | Bubble detector |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5954936A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63309846A (en) * | 1987-06-11 | 1988-12-16 | Osaka Oxygen Ind Ltd | Method and device for measuring trace moisture quantity in gas |
JPH01143929A (en) * | 1987-12-01 | 1989-06-06 | Kayaba Ind Co Ltd | Leak detecting method using air bubble signal |
US6773577B1 (en) | 2001-09-19 | 2004-08-10 | Teledyne Technologies Incorporated | Electrochemical cell bubble detection |
US7664607B2 (en) | 2005-10-04 | 2010-02-16 | Teledyne Technologies Incorporated | Pre-calibrated gas sensor |
JP2018169288A (en) * | 2017-03-30 | 2018-11-01 | 倉敷紡績株式会社 | Property measurement device and property measurement method |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5216178A (en) * | 1975-07-28 | 1977-02-07 | Sharp Corp | Airtightness testing device |
JPS55134335A (en) * | 1979-04-06 | 1980-10-20 | Daifuku Co Ltd | Inspecting device of leakage |
JPS57110932A (en) * | 1980-12-27 | 1982-07-10 | Toyota Motor Corp | Leakage detection of sealed container and device thereof |
-
1982
- 1982-09-22 JP JP16411782A patent/JPS5954936A/en active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5216178A (en) * | 1975-07-28 | 1977-02-07 | Sharp Corp | Airtightness testing device |
JPS55134335A (en) * | 1979-04-06 | 1980-10-20 | Daifuku Co Ltd | Inspecting device of leakage |
JPS57110932A (en) * | 1980-12-27 | 1982-07-10 | Toyota Motor Corp | Leakage detection of sealed container and device thereof |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63309846A (en) * | 1987-06-11 | 1988-12-16 | Osaka Oxygen Ind Ltd | Method and device for measuring trace moisture quantity in gas |
JPH01143929A (en) * | 1987-12-01 | 1989-06-06 | Kayaba Ind Co Ltd | Leak detecting method using air bubble signal |
US6773577B1 (en) | 2001-09-19 | 2004-08-10 | Teledyne Technologies Incorporated | Electrochemical cell bubble detection |
US7664607B2 (en) | 2005-10-04 | 2010-02-16 | Teledyne Technologies Incorporated | Pre-calibrated gas sensor |
JP2018169288A (en) * | 2017-03-30 | 2018-11-01 | 倉敷紡績株式会社 | Property measurement device and property measurement method |
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