JPS57136104A - Pitch detector - Google Patents

Pitch detector

Info

Publication number
JPS57136104A
JPS57136104A JP2270881A JP2270881A JPS57136104A JP S57136104 A JPS57136104 A JP S57136104A JP 2270881 A JP2270881 A JP 2270881A JP 2270881 A JP2270881 A JP 2270881A JP S57136104 A JPS57136104 A JP S57136104A
Authority
JP
Japan
Prior art keywords
pattern
pitch
slit
light
detecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2270881A
Other languages
Japanese (ja)
Inventor
Akito Iwamoto
Hidekazu Sekizawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP2270881A priority Critical patent/JPS57136104A/en
Publication of JPS57136104A publication Critical patent/JPS57136104A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures

Abstract

PURPOSE:To obtain an inexpensive detector capable of detecting a pitch quickly and at a high accuracy by a structure in which a reflected image from a pattern arranged at a specified cycle is received with a photoelectric converter through a slit with a slit width about one half the average pitch. CONSTITUTION:Light of the light source 21 irradiates an object 21 with a pattern 211 of a specified cycle and the reflected light comes onto a screen 24 via an image forming lens 23 on a moving system 28 to project a pattern 211. The emitted light is received with a photoelectric converter 27 through a slit 26 with a slit width one-half the average pitch of the pattern 211. The waveform signal and a coordinate data signal of the moving system 28 are transmitted to a computing section 29 to compute the pitch of the pattern 211. This provides an inexpensive detector capable of detecting the pitch quickly and at a high accuracy.
JP2270881A 1981-02-18 1981-02-18 Pitch detector Pending JPS57136104A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2270881A JPS57136104A (en) 1981-02-18 1981-02-18 Pitch detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2270881A JPS57136104A (en) 1981-02-18 1981-02-18 Pitch detector

Publications (1)

Publication Number Publication Date
JPS57136104A true JPS57136104A (en) 1982-08-23

Family

ID=12090337

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2270881A Pending JPS57136104A (en) 1981-02-18 1981-02-18 Pitch detector

Country Status (1)

Country Link
JP (1) JPS57136104A (en)

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