JPS57135799A - Chemically etching solution for crystals of 3-5 group element compounds - Google Patents

Info

Publication number

JPS57135799A

JPS57135799A JP1896281A JP1896281A JPS57135799A JP S57135799 A JPS57135799 A JP S57135799A JP 1896281 A JP1896281 A JP 1896281A JP 1896281 A JP1896281 A JP 1896281A JP S57135799 A JPS57135799 A JP S57135799A

Authority

JP

Japan

Prior art keywords

etching solution

acid

group element

element compounds

crystals

Prior art date

1981-02-13

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

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• 238000005530 etching Methods 0.000 title abstract 4
• 150000001875 compounds Chemical class 0.000 title abstract 2
• 239000013078 crystal Substances 0.000 title abstract 2
• QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 abstract 8
• NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 abstract 6
• 239000000243 solution Substances 0.000 abstract 4
• 229910000147 aluminium phosphate Inorganic materials 0.000 abstract 3
• BMYNFMYTOJXKLE-UHFFFAOYSA-N 3-azaniumyl-2-hydroxypropanoate Chemical compound NCC(O)C(O)=O BMYNFMYTOJXKLE-UHFFFAOYSA-N 0.000 abstract 2
• CPELXLSAUQHCOX-UHFFFAOYSA-N Hydrogen bromide Chemical compound Br CPELXLSAUQHCOX-UHFFFAOYSA-N 0.000 abstract 2
• 239000003513 alkali Substances 0.000 abstract 2
• 239000007864 aqueous solution Substances 0.000 abstract 2
• SOCTUWSJJQCPFX-UHFFFAOYSA-N dichromate(2-) Chemical compound [O-][Cr](=O)(=O)O[Cr]([O-])(=O)=O SOCTUWSJJQCPFX-UHFFFAOYSA-N 0.000 abstract 2
• 239000002253 acid Substances 0.000 abstract 1
• 150000001447 alkali salts Chemical class 0.000 abstract 1
• 230000015572 biosynthetic process Effects 0.000 abstract 1
• 229910000042 hydrogen bromide Inorganic materials 0.000 abstract 1