JPS5765727A - Etchant for polyimide resin - Google Patents
Etchant for polyimide resinInfo
- Publication number
- JPS5765727A JPS5765727A JP14168180A JP14168180A JPS5765727A JP S5765727 A JPS5765727 A JP S5765727A JP 14168180 A JP14168180 A JP 14168180A JP 14168180 A JP14168180 A JP 14168180A JP S5765727 A JPS5765727 A JP S5765727A
- Authority
- JP
- Japan
- Prior art keywords
- polyimide resin
- etchant
- alcoholic
- aqueous
- concentration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Photosensitive Polymer And Photoresist Processing (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Weting (AREA)
Abstract
PURPOSE: Titled etchant capable of forming, with precision, fine through holes in a polyimide resin film, comprising an aqueous (or alcoholic) solution containing tetramethylammonium hydroxide and a polyamide compound.
CONSTITUTION: An etchant suitalbe to etch a polyimide resin, comprising an (aqueous or alcoholic) solution containing tetramethylammonium hydroxide in a concentration of 10W30wt% and a polyamine compound of the formula, wherein R is a 2C or higher atomic group, e.g., ethylenediamine, in a concentration of 1W 30wt%.
COPYRIGHT: (C)1982,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14168180A JPS6054980B2 (en) | 1980-10-08 | 1980-10-08 | Etching liquid for forming through holes in polyimide resin |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14168180A JPS6054980B2 (en) | 1980-10-08 | 1980-10-08 | Etching liquid for forming through holes in polyimide resin |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5765727A true JPS5765727A (en) | 1982-04-21 |
JPS6054980B2 JPS6054980B2 (en) | 1985-12-03 |
Family
ID=15297726
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14168180A Expired JPS6054980B2 (en) | 1980-10-08 | 1980-10-08 | Etching liquid for forming through holes in polyimide resin |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6054980B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2002006423A1 (en) * | 2000-07-18 | 2002-01-24 | 3M Innovative Properties Company | Liquid crystal polymers for flexible circuits |
FR2834180A1 (en) * | 2001-12-20 | 2003-06-27 | Org Europeene De Rech | Production of a multi layer module for high-density printed circuits comprises anisotropically etching micro holes through a metal-coated polyimide film |
-
1980
- 1980-10-08 JP JP14168180A patent/JPS6054980B2/en not_active Expired
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2002006423A1 (en) * | 2000-07-18 | 2002-01-24 | 3M Innovative Properties Company | Liquid crystal polymers for flexible circuits |
FR2834180A1 (en) * | 2001-12-20 | 2003-06-27 | Org Europeene De Rech | Production of a multi layer module for high-density printed circuits comprises anisotropically etching micro holes through a metal-coated polyimide film |
WO2003055288A1 (en) * | 2001-12-20 | 2003-07-03 | Organisation Europeenne Pour La Recherche Nucleaire | Method for making a multilayer module with high-density printed circuits |
US7135119B2 (en) | 2001-12-20 | 2006-11-14 | Organisation Europeenne Pour La Recherche Nucleaire | Method for making a multilayer module with high-density printed circuits |
Also Published As
Publication number | Publication date |
---|---|
JPS6054980B2 (en) | 1985-12-03 |
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