JPS57128306A - Manufacture for optical circuit - Google Patents

Manufacture for optical circuit

Info

Publication number
JPS57128306A
JPS57128306A JP1348181A JP1348181A JPS57128306A JP S57128306 A JPS57128306 A JP S57128306A JP 1348181 A JP1348181 A JP 1348181A JP 1348181 A JP1348181 A JP 1348181A JP S57128306 A JPS57128306 A JP S57128306A
Authority
JP
Japan
Prior art keywords
vessel
substrate
glass vessel
pattern
ample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1348181A
Other languages
Japanese (ja)
Other versions
JPS6119965B2 (en
Inventor
Takashi Kurokawa
Shigeru Oikawa
Shigeo Nara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP1348181A priority Critical patent/JPS57128306A/en
Publication of JPS57128306A publication Critical patent/JPS57128306A/en
Publication of JPS6119965B2 publication Critical patent/JPS6119965B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/001—Phase modulating patterns, e.g. refractive index patterns

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

PURPOSE:To manufacture an optical circuit with a complicated three dimensional pattern with a simple manufacturing process, by supplying a liquid monomer with lower refractive index than that around a polymer produced on a substrate and removing the substrate after the polymerization. CONSTITUTION:A monomer 10 being a raw material of transparent high refractive index polymer is filled in an ample 11 installed in a constant temperature tank 12, and the ample 11 is connected to a glass vessel 14 with a connection pipe 13 via a cock 26. The glass vessel 14 is connected to a vacuum pump via a pipe 25 and a cock 28, and a substrate 16 which can be moved with a supporting rod 17 is located in the vessel 14 through the adhesion to an exposed plane 15 of the glass vessel 14. The exposed system consists of an ultraviolet ray lamp 20, mask film 21 on which patterns to be manufactured are continuously drawn, and lens 19, the pattern of the film 21 is image-formed on one surface 15 of the vessel 14. The image on the plane 15 is continuously changed by moving the mask film 21 as a projector to form dynamic pattern of ultraviolet rays.
JP1348181A 1981-01-31 1981-01-31 Manufacture for optical circuit Granted JPS57128306A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1348181A JPS57128306A (en) 1981-01-31 1981-01-31 Manufacture for optical circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1348181A JPS57128306A (en) 1981-01-31 1981-01-31 Manufacture for optical circuit

Publications (2)

Publication Number Publication Date
JPS57128306A true JPS57128306A (en) 1982-08-09
JPS6119965B2 JPS6119965B2 (en) 1986-05-20

Family

ID=11834306

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1348181A Granted JPS57128306A (en) 1981-01-31 1981-01-31 Manufacture for optical circuit

Country Status (1)

Country Link
JP (1) JPS57128306A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60181707A (en) * 1984-02-29 1985-09-17 Fujitsu Ltd Formation of optical integrated circuit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60181707A (en) * 1984-02-29 1985-09-17 Fujitsu Ltd Formation of optical integrated circuit

Also Published As

Publication number Publication date
JPS6119965B2 (en) 1986-05-20

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