JPS5712588A - Manufacture of buried type heterojunction laser element - Google Patents
Manufacture of buried type heterojunction laser elementInfo
- Publication number
- JPS5712588A JPS5712588A JP8704780A JP8704780A JPS5712588A JP S5712588 A JPS5712588 A JP S5712588A JP 8704780 A JP8704780 A JP 8704780A JP 8704780 A JP8704780 A JP 8704780A JP S5712588 A JPS5712588 A JP S5712588A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- substrate
- laser element
- buried type
- side electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 abstract 4
- 239000000758 substrate Substances 0.000 abstract 4
- 239000004065 semiconductor Substances 0.000 abstract 3
- 238000003486 chemical etching Methods 0.000 abstract 1
- 238000003776 cleavage reaction Methods 0.000 abstract 1
- 239000013078 crystal Substances 0.000 abstract 1
- 238000009792 diffusion process Methods 0.000 abstract 1
- 239000012535 impurity Substances 0.000 abstract 1
- 230000007017 scission Effects 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
- H01S5/227—Buried mesa structure ; Striped active layer
Landscapes
- Physics & Mathematics (AREA)
- Geometry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Semiconductor Lasers (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8704780A JPS5712588A (en) | 1980-06-26 | 1980-06-26 | Manufacture of buried type heterojunction laser element |
US06/277,508 US4429397A (en) | 1980-06-26 | 1981-06-26 | Buried heterostructure laser diode |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8704780A JPS5712588A (en) | 1980-06-26 | 1980-06-26 | Manufacture of buried type heterojunction laser element |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5712588A true JPS5712588A (en) | 1982-01-22 |
JPS6344311B2 JPS6344311B2 (enrdf_load_stackoverflow) | 1988-09-05 |
Family
ID=13904020
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8704780A Granted JPS5712588A (en) | 1980-06-26 | 1980-06-26 | Manufacture of buried type heterojunction laser element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5712588A (enrdf_load_stackoverflow) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61183987A (ja) * | 1985-02-08 | 1986-08-16 | Sony Corp | 半導体レ−ザ− |
JPS6373690A (ja) * | 1986-09-17 | 1988-04-04 | Matsushita Electric Ind Co Ltd | 半導体レ−ザ装置 |
FR2637743A1 (fr) * | 1988-10-06 | 1990-04-13 | France Etat | Laser a semiconducteur a ruban enterre et a couche bloquante et procede de fabrication de ce laser |
-
1980
- 1980-06-26 JP JP8704780A patent/JPS5712588A/ja active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61183987A (ja) * | 1985-02-08 | 1986-08-16 | Sony Corp | 半導体レ−ザ− |
JPS6373690A (ja) * | 1986-09-17 | 1988-04-04 | Matsushita Electric Ind Co Ltd | 半導体レ−ザ装置 |
FR2637743A1 (fr) * | 1988-10-06 | 1990-04-13 | France Etat | Laser a semiconducteur a ruban enterre et a couche bloquante et procede de fabrication de ce laser |
Also Published As
Publication number | Publication date |
---|---|
JPS6344311B2 (enrdf_load_stackoverflow) | 1988-09-05 |
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