JPS57124145U - - Google Patents

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Publication number
JPS57124145U
JPS57124145U JP918281U JP918281U JPS57124145U JP S57124145 U JPS57124145 U JP S57124145U JP 918281 U JP918281 U JP 918281U JP 918281 U JP918281 U JP 918281U JP S57124145 U JPS57124145 U JP S57124145U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP918281U
Other languages
Japanese (ja)
Other versions
JPS6218034Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981009182U priority Critical patent/JPS6218034Y2/ja
Publication of JPS57124145U publication Critical patent/JPS57124145U/ja
Application granted granted Critical
Publication of JPS6218034Y2 publication Critical patent/JPS6218034Y2/ja
Expired legal-status Critical Current

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  • Drying Of Solid Materials (AREA)
JP1981009182U 1981-01-27 1981-01-27 Expired JPS6218034Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981009182U JPS6218034Y2 (enrdf_load_stackoverflow) 1981-01-27 1981-01-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981009182U JPS6218034Y2 (enrdf_load_stackoverflow) 1981-01-27 1981-01-27

Publications (2)

Publication Number Publication Date
JPS57124145U true JPS57124145U (enrdf_load_stackoverflow) 1982-08-03
JPS6218034Y2 JPS6218034Y2 (enrdf_load_stackoverflow) 1987-05-09

Family

ID=29807317

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981009182U Expired JPS6218034Y2 (enrdf_load_stackoverflow) 1981-01-27 1981-01-27

Country Status (1)

Country Link
JP (1) JPS6218034Y2 (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63177034U (enrdf_load_stackoverflow) * 1987-05-06 1988-11-16
JPH01255227A (ja) * 1988-04-04 1989-10-12 Dainippon Screen Mfg Co Ltd 基板の回転式表面処理装置
JPH06112186A (ja) * 1992-09-25 1994-04-22 Dainippon Screen Mfg Co Ltd 横軸回転式基板乾燥装置
JPH07176513A (ja) * 1994-10-06 1995-07-14 Dainippon Screen Mfg Co Ltd 基板処理装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5249504U (enrdf_load_stackoverflow) * 1975-10-07 1977-04-08
JPS5295165A (en) * 1976-02-06 1977-08-10 Hitachi Ltd Wafer cleansing tool
JPS55115332A (en) * 1979-02-26 1980-09-05 Mitsubishi Electric Corp Washing and drying apparatus for photomask

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5249504U (enrdf_load_stackoverflow) * 1975-10-07 1977-04-08
JPS5295165A (en) * 1976-02-06 1977-08-10 Hitachi Ltd Wafer cleansing tool
JPS55115332A (en) * 1979-02-26 1980-09-05 Mitsubishi Electric Corp Washing and drying apparatus for photomask

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63177034U (enrdf_load_stackoverflow) * 1987-05-06 1988-11-16
JPH01255227A (ja) * 1988-04-04 1989-10-12 Dainippon Screen Mfg Co Ltd 基板の回転式表面処理装置
JPH06112186A (ja) * 1992-09-25 1994-04-22 Dainippon Screen Mfg Co Ltd 横軸回転式基板乾燥装置
JPH07176513A (ja) * 1994-10-06 1995-07-14 Dainippon Screen Mfg Co Ltd 基板処理装置

Also Published As

Publication number Publication date
JPS6218034Y2 (enrdf_load_stackoverflow) 1987-05-09

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