JPS5249504U - - Google Patents

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Publication number
JPS5249504U
JPS5249504U JP13633175U JP13633175U JPS5249504U JP S5249504 U JPS5249504 U JP S5249504U JP 13633175 U JP13633175 U JP 13633175U JP 13633175 U JP13633175 U JP 13633175U JP S5249504 U JPS5249504 U JP S5249504U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13633175U
Other languages
Japanese (ja)
Other versions
JPS5531113Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13633175U priority Critical patent/JPS5531113Y2/ja
Publication of JPS5249504U publication Critical patent/JPS5249504U/ja
Application granted granted Critical
Publication of JPS5531113Y2 publication Critical patent/JPS5531113Y2/ja
Expired legal-status Critical Current

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  • Excavating Of Shafts Or Tunnels (AREA)
JP13633175U 1975-10-07 1975-10-07 Expired JPS5531113Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13633175U JPS5531113Y2 (enrdf_load_stackoverflow) 1975-10-07 1975-10-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13633175U JPS5531113Y2 (enrdf_load_stackoverflow) 1975-10-07 1975-10-07

Publications (2)

Publication Number Publication Date
JPS5249504U true JPS5249504U (enrdf_load_stackoverflow) 1977-04-08
JPS5531113Y2 JPS5531113Y2 (enrdf_load_stackoverflow) 1980-07-24

Family

ID=28616325

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13633175U Expired JPS5531113Y2 (enrdf_load_stackoverflow) 1975-10-07 1975-10-07

Country Status (1)

Country Link
JP (1) JPS5531113Y2 (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55154736A (en) * 1979-05-23 1980-12-02 Sigma Gijutsu Kogyo Kk Centrifugal drier
JPS57124145U (enrdf_load_stackoverflow) * 1981-01-27 1982-08-03
JPS60125727U (ja) * 1984-02-02 1985-08-24 黒谷　巌 半導体材料のキヤリヤ用クレイドル
JPS60192438U (ja) * 1984-05-31 1985-12-20 エフ・エス・アイジヤパン株式会社 半導体用ウエハ−洗浄装置におけるグレ−ドル

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55154736A (en) * 1979-05-23 1980-12-02 Sigma Gijutsu Kogyo Kk Centrifugal drier
JPS57124145U (enrdf_load_stackoverflow) * 1981-01-27 1982-08-03
JPS60125727U (ja) * 1984-02-02 1985-08-24 黒谷　巌 半導体材料のキヤリヤ用クレイドル
JPS60192438U (ja) * 1984-05-31 1985-12-20 エフ・エス・アイジヤパン株式会社 半導体用ウエハ−洗浄装置におけるグレ−ドル

Also Published As

Publication number Publication date
JPS5531113Y2 (enrdf_load_stackoverflow) 1980-07-24

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