JPS57120842A - Detecting method for dust using electric charge coupling element - Google Patents
Detecting method for dust using electric charge coupling elementInfo
- Publication number
- JPS57120842A JPS57120842A JP616881A JP616881A JPS57120842A JP S57120842 A JPS57120842 A JP S57120842A JP 616881 A JP616881 A JP 616881A JP 616881 A JP616881 A JP 616881A JP S57120842 A JPS57120842 A JP S57120842A
- Authority
- JP
- Japan
- Prior art keywords
- dust
- electric charge
- wafer
- dimensions
- coupling element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000428 dust Substances 0.000 title abstract 8
- 230000008878 coupling Effects 0.000 title abstract 3
- 238000010168 coupling process Methods 0.000 title abstract 3
- 238000005859 coupling reaction Methods 0.000 title abstract 3
- 238000000034 method Methods 0.000 title 1
- 230000003247 decreasing effect Effects 0.000 abstract 2
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/02—Investigating particle size or size distribution
- G01N15/0205—Investigating particle size or size distribution by optical means
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Life Sciences & Earth Sciences (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Dispersion Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Computer Hardware Design (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
PURPOSE:To measure powdered dust having a minute grain diameter in the atmosphere accurately and quantitatively in a short time, by using an electric charge coupling element formed many picture elements on a wafer. CONSTITUTION:A main body 1 of electric charge coupling element is constituted by forming many picture elements 3 on a wafer 3. A photodetecting area M of the element 3 is set in several kinds in the range from several microns to several tens microns in accordance with the dimensions of a minute grain diameter dust 5 to be measured. an output signal of each element 3 is supplied to an operation circuit 8 of an operator 7 through a cable 6. When the dust 5 is found on the element 3, incident light to the element 3 is decreased depending on the dimensions of the dust 5 and the transmissivity of the dust to the light and the quantity of electric charge accumulated in the wafer 2 is decreased in the same ratio. The signal of this electric charge is supplied to the circuit 8 and the dimensions of the dust 5 is operated basing on the value of transmissivity of preliminarily supplied dust 5 and the output signal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP616881A JPS57120842A (en) | 1981-01-19 | 1981-01-19 | Detecting method for dust using electric charge coupling element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP616881A JPS57120842A (en) | 1981-01-19 | 1981-01-19 | Detecting method for dust using electric charge coupling element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS57120842A true JPS57120842A (en) | 1982-07-28 |
Family
ID=11631003
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP616881A Pending JPS57120842A (en) | 1981-01-19 | 1981-01-19 | Detecting method for dust using electric charge coupling element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57120842A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008042199A2 (en) * | 2006-09-29 | 2008-04-10 | Cyberoptics Semiconductor, Inc. | Particles sensor integrated with substrate |
-
1981
- 1981-01-19 JP JP616881A patent/JPS57120842A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008042199A2 (en) * | 2006-09-29 | 2008-04-10 | Cyberoptics Semiconductor, Inc. | Particles sensor integrated with substrate |
| WO2008042199A3 (en) * | 2006-09-29 | 2008-07-03 | Cyberoptics Semiconductor Inc | Particles sensor integrated with substrate |
| GB2455006A (en) * | 2006-09-29 | 2009-05-27 | Cyberoptics Semiconductor Inc | Substrate-like particle sensor |
| JP2010505118A (en) * | 2006-09-29 | 2010-02-18 | サイバーオプティクス セミコンダクタ インコーポレイテッド | Particle sensor integrated with substrate |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS57139607A (en) | Position measuring equipment | |
| CA1204201A (en) | Optical inspection system | |
| JPS57211044A (en) | Inspecting device | |
| IE812517L (en) | Detecting particles on a material | |
| JPS5644803A (en) | System measuring for thickness of nonmetallic sheet like object | |
| JPS57120842A (en) | Detecting method for dust using electric charge coupling element | |
| GB905729A (en) | Improved inspection device | |
| JPS5355983A (en) | Automatic micro defect detector | |
| JPS5714704A (en) | Signal processing system for semiconductor position detecting sensor | |
| GB1248283A (en) | Inspection apparatus | |
| JPS5358286A (en) | Measuring method of grinding characteristics | |
| JPS5669505A (en) | Laser position detecting device | |
| JPS564004A (en) | System for detecting minute defects of body | |
| JPS5717873A (en) | Inspection method of semiconductor element | |
| JPS6468609A (en) | Charging state detecting method for concrete | |
| JPS6425578A (en) | Semiconductor container | |
| SU1377815A1 (en) | Optical density diital pickup | |
| JPS57128925A (en) | Inspection for defect of reticle | |
| JPS5262448A (en) | Lens surface monitoring device of photoelectric instrument | |
| JPS55151868A (en) | Solid state pickup device | |
| JPS51151155A (en) | Photoelectric sensor | |
| JPS56101564A (en) | Noise measuring device of audio element | |
| JPS5735714A (en) | Optical displacement measuring device | |
| JPS5529760A (en) | Measuring method for size of fruit | |
| JPS57154002A (en) | Size measuring device |