JPS57113377A - Semiconductor testing device - Google Patents

Semiconductor testing device

Info

Publication number
JPS57113377A
JPS57113377A JP56000291A JP29181A JPS57113377A JP S57113377 A JPS57113377 A JP S57113377A JP 56000291 A JP56000291 A JP 56000291A JP 29181 A JP29181 A JP 29181A JP S57113377 A JPS57113377 A JP S57113377A
Authority
JP
Japan
Prior art keywords
case
50omega
measurement
pin
end terminal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56000291A
Other languages
Japanese (ja)
Other versions
JPH0440667B2 (en
Inventor
Akira Yamagiwa
Ryozo Yoshino
Takashi Matsumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP56000291A priority Critical patent/JPS57113377A/en
Publication of JPS57113377A publication Critical patent/JPS57113377A/en
Publication of JPH0440667B2 publication Critical patent/JPH0440667B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2607—Circuits therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To make it possible for line impedance of an interface section of an object, which is being measured, to cope with 50OMEGA and even with 100OMEGA, by changing a driver in the case of output and a terminal line in the case of input. CONSTITUTION:A semicondutor testing device 30 is connected through a 50OMEGA distributed constant line 34 in the case of testing an ECL high-speed object 33 to be tested and a sending-end terminal of a driver 31 is to be 50OMEGA when a pin of the object of measurement is an input pin, and the driver 31 generates terminal voltage at a far-end terminal of 50OMEGA if the pin is an output pin, and further, pulse discrimination is conducted by a high-speed comparator 32 of high input impedance. And then, in case if the object of measurement is of a low driving capacity such as TTL or MOS, by using a 100OMEGA distributed constant line 36, the sending-end terminal and the far-end terminal are changed over to 100OMEGA for execution of the measurement. It is possible, by doing so, to achieve a high- accuracy measurement without causing disturbance to wave shape even in the case of an element of small driving capacity.
JP56000291A 1981-01-07 1981-01-07 Semiconductor testing device Granted JPS57113377A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56000291A JPS57113377A (en) 1981-01-07 1981-01-07 Semiconductor testing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56000291A JPS57113377A (en) 1981-01-07 1981-01-07 Semiconductor testing device

Publications (2)

Publication Number Publication Date
JPS57113377A true JPS57113377A (en) 1982-07-14
JPH0440667B2 JPH0440667B2 (en) 1992-07-03

Family

ID=11469798

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56000291A Granted JPS57113377A (en) 1981-01-07 1981-01-07 Semiconductor testing device

Country Status (1)

Country Link
JP (1) JPS57113377A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62190738A (en) * 1985-12-23 1987-08-20 テクトロニツクス・インコ−ポレイテツド Wafer prober
JPH05188110A (en) * 1983-06-13 1993-07-30 Yokogawa Hewlett Packard Ltd Method for preventing overheat of electronic device
CN103383416A (en) * 2012-05-04 2013-11-06 南亚科技股份有限公司 System and method for testing off-chip driver impedance

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54104870U (en) * 1978-01-06 1979-07-24

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54104870U (en) * 1978-01-06 1979-07-24

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05188110A (en) * 1983-06-13 1993-07-30 Yokogawa Hewlett Packard Ltd Method for preventing overheat of electronic device
JPS62190738A (en) * 1985-12-23 1987-08-20 テクトロニツクス・インコ−ポレイテツド Wafer prober
CN103383416A (en) * 2012-05-04 2013-11-06 南亚科技股份有限公司 System and method for testing off-chip driver impedance

Also Published As

Publication number Publication date
JPH0440667B2 (en) 1992-07-03

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