JPS57112748A - Removing method for secularly discolored part of silver salt mask - Google Patents

Removing method for secularly discolored part of silver salt mask

Info

Publication number
JPS57112748A
JPS57112748A JP18791780A JP18791780A JPS57112748A JP S57112748 A JPS57112748 A JP S57112748A JP 18791780 A JP18791780 A JP 18791780A JP 18791780 A JP18791780 A JP 18791780A JP S57112748 A JPS57112748 A JP S57112748A
Authority
JP
Japan
Prior art keywords
mask
soln
silver salt
secularly
discolored parts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18791780A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6235100B2 (enExample
Inventor
Shigeaki Mori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP18791780A priority Critical patent/JPS57112748A/ja
Publication of JPS57112748A publication Critical patent/JPS57112748A/ja
Publication of JPS6235100B2 publication Critical patent/JPS6235100B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/54—Absorbers, e.g. of opaque materials

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Silver Salt Photography Or Processing Solution Therefor (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
JP18791780A 1980-12-29 1980-12-29 Removing method for secularly discolored part of silver salt mask Granted JPS57112748A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18791780A JPS57112748A (en) 1980-12-29 1980-12-29 Removing method for secularly discolored part of silver salt mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18791780A JPS57112748A (en) 1980-12-29 1980-12-29 Removing method for secularly discolored part of silver salt mask

Publications (2)

Publication Number Publication Date
JPS57112748A true JPS57112748A (en) 1982-07-13
JPS6235100B2 JPS6235100B2 (enExample) 1987-07-30

Family

ID=16214460

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18791780A Granted JPS57112748A (en) 1980-12-29 1980-12-29 Removing method for secularly discolored part of silver salt mask

Country Status (1)

Country Link
JP (1) JPS57112748A (enExample)

Also Published As

Publication number Publication date
JPS6235100B2 (enExample) 1987-07-30

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