JPS57111459A - Voltage measuring device using electron beam - Google Patents

Voltage measuring device using electron beam

Info

Publication number
JPS57111459A
JPS57111459A JP55187912A JP18791280A JPS57111459A JP S57111459 A JPS57111459 A JP S57111459A JP 55187912 A JP55187912 A JP 55187912A JP 18791280 A JP18791280 A JP 18791280A JP S57111459 A JPS57111459 A JP S57111459A
Authority
JP
Japan
Prior art keywords
voltage
retarding
analyzers
adder
grids
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP55187912A
Other languages
Japanese (ja)
Inventor
Yoshiaki Goto
Yasuo Furukawa
Akio Ito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP55187912A priority Critical patent/JPS57111459A/en
Publication of JPS57111459A publication Critical patent/JPS57111459A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/305—Contactless testing using electron beams

Abstract

PURPOSE:To eleminate an error of measurement caused by various factors, by controlling the difference of retarding voltage between two energy analyzers to a constant value and accordingly normalizing the output signals of these analyzers. CONSTITUTION:The output signal S and S+DELTAS of energy analyzers 4 and 4' are applied to a differential amplifier 16 via amplifiers 15 and 15'. The differential signal of these outputs is supplied to an adder 18 along with the feedback initial voltage supplied from a power supply circuit 17. The retarding voltage given from the adder 18 controls voltage source 10 and 11 of retarding grids 9 and 9'. As a result, the voltage difference between the grids 9 and 9' is always set at a constant value, and the ratio of output signals is always constant between the analyzer 4 and 4'.
JP55187912A 1980-12-29 1980-12-29 Voltage measuring device using electron beam Pending JPS57111459A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55187912A JPS57111459A (en) 1980-12-29 1980-12-29 Voltage measuring device using electron beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55187912A JPS57111459A (en) 1980-12-29 1980-12-29 Voltage measuring device using electron beam

Publications (1)

Publication Number Publication Date
JPS57111459A true JPS57111459A (en) 1982-07-10

Family

ID=16214373

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55187912A Pending JPS57111459A (en) 1980-12-29 1980-12-29 Voltage measuring device using electron beam

Country Status (1)

Country Link
JP (1) JPS57111459A (en)

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