JPS57108602A - Measuring device for film thickness - Google Patents

Measuring device for film thickness

Info

Publication number
JPS57108602A
JPS57108602A JP18279980A JP18279980A JPS57108602A JP S57108602 A JPS57108602 A JP S57108602A JP 18279980 A JP18279980 A JP 18279980A JP 18279980 A JP18279980 A JP 18279980A JP S57108602 A JPS57108602 A JP S57108602A
Authority
JP
Japan
Prior art keywords
film thickness
groove
film
measuring device
insulator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18279980A
Other languages
Japanese (ja)
Inventor
Masao Sakanaka
Masahiro Uno
Takeo Tanaka
Atsuo Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Fuji Electric Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd, Fuji Electric Manufacturing Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP18279980A priority Critical patent/JPS57108602A/en
Publication of JPS57108602A publication Critical patent/JPS57108602A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/08—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using capacitive means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

PURPOSE:To permit a constantly stable measurement of film thickness, by a method wherein a groove is formed in an insultor around a capacitor as a film thickness detecting element, and a negative pressure is introduced into the groove. CONSTITUTION:A film thickness sensor 9 is of such type as capable of measuring film thickness simply by contacting with one surface of a film 1, and made by forming an electrode directly on an insulator 10. A groove 11 is formed around the film thickness sensor 9, and an extremely low negative pressure is applied to the groove 11 by employing a pump 12 in order to allow the film 1 sliding on the surface of the insulator 10 to closely contact with the film thickness sensor 9, thereby to permit a stable measurement of film thickness.
JP18279980A 1980-12-25 1980-12-25 Measuring device for film thickness Pending JPS57108602A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18279980A JPS57108602A (en) 1980-12-25 1980-12-25 Measuring device for film thickness

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18279980A JPS57108602A (en) 1980-12-25 1980-12-25 Measuring device for film thickness

Publications (1)

Publication Number Publication Date
JPS57108602A true JPS57108602A (en) 1982-07-06

Family

ID=16124616

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18279980A Pending JPS57108602A (en) 1980-12-25 1980-12-25 Measuring device for film thickness

Country Status (1)

Country Link
JP (1) JPS57108602A (en)

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