JPS57107542A - Hollow-cathode discharge device - Google Patents

Hollow-cathode discharge device

Info

Publication number
JPS57107542A
JPS57107542A JP55184225A JP18422580A JPS57107542A JP S57107542 A JPS57107542 A JP S57107542A JP 55184225 A JP55184225 A JP 55184225A JP 18422580 A JP18422580 A JP 18422580A JP S57107542 A JPS57107542 A JP S57107542A
Authority
JP
Japan
Prior art keywords
cathode
board
opening
hollow
heater
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP55184225A
Other languages
Japanese (ja)
Inventor
Setsuo Suzuki
Osamu Morimiya
Shigeki Kadoma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP55184225A priority Critical patent/JPS57107542A/en
Publication of JPS57107542A publication Critical patent/JPS57107542A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/022—Details

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Solid Thermionic Cathode (AREA)

Abstract

PURPOSE:To reduce the power consumption and to lengthen the service life by constructing the starting electrode with a board having small hole from one open end of a hollow cathode and facing in the proximity of said opening and a tubular member surrounding the cathode. CONSTITUTION:A heater 22 for heating a cathode 21 is provided on the outer circumference of a cathode 21 formed with a thermion emitting material. A starting electrode 26 is fixed through a circular insulator 25 to one opening of the hollow cathode 21, where said starting electrode 26 is faced with a tubular member 27 surrounding the cathode 26 and the heater 22 at one opening of the cathode 21 and a board 28 having a small hole 28a from opening of said cathode 21 is formed integrally. The heat from the heater 22 is shielded by the tubular member 27 while the gas flow from the board 28 is limited by said board 28. Consequently the power consumption is reduced and the service life can be lengthened.
JP55184225A 1980-12-25 1980-12-25 Hollow-cathode discharge device Pending JPS57107542A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55184225A JPS57107542A (en) 1980-12-25 1980-12-25 Hollow-cathode discharge device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55184225A JPS57107542A (en) 1980-12-25 1980-12-25 Hollow-cathode discharge device

Publications (1)

Publication Number Publication Date
JPS57107542A true JPS57107542A (en) 1982-07-05

Family

ID=16149552

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55184225A Pending JPS57107542A (en) 1980-12-25 1980-12-25 Hollow-cathode discharge device

Country Status (1)

Country Link
JP (1) JPS57107542A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010011592A1 (en) * 2010-03-16 2011-09-22 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Hollow cathode plasma source and use of the hollow cathode plasma source
CN110931328A (en) * 2019-12-06 2020-03-27 中国电子科技集团公司第十二研究所 Cathode heater assembly

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010011592A1 (en) * 2010-03-16 2011-09-22 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Hollow cathode plasma source and use of the hollow cathode plasma source
CN110931328A (en) * 2019-12-06 2020-03-27 中国电子科技集团公司第十二研究所 Cathode heater assembly
CN110931328B (en) * 2019-12-06 2022-04-19 中国电子科技集团公司第十二研究所 Cathode heater assembly

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