JPS57107540A - Hollow-cathode discharge device - Google Patents

Hollow-cathode discharge device

Info

Publication number
JPS57107540A
JPS57107540A JP55184223A JP18422380A JPS57107540A JP S57107540 A JPS57107540 A JP S57107540A JP 55184223 A JP55184223 A JP 55184223A JP 18422380 A JP18422380 A JP 18422380A JP S57107540 A JPS57107540 A JP S57107540A
Authority
JP
Japan
Prior art keywords
cathode
tubular
hollow
hollow cathode
orifice section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP55184223A
Other languages
Japanese (ja)
Inventor
Shigeki Kadoma
Setsuo Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP55184223A priority Critical patent/JPS57107540A/en
Publication of JPS57107540A publication Critical patent/JPS57107540A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/022—Details

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Solid Thermionic Cathode (AREA)

Abstract

PURPOSE:To increase the discharge current and to lengthen the service life of a cathode, by forming the orifice section at the tip of a hollow cathode with a porous board. CONSTITUTION:A hollow cathode 2 one opening of which is led out to the outside of a discharge chamber and a tubular cathode 3 facing with the other opening are provided in the discharge chamber 1. The hollow cathode 2 is formed with a tubular member 4, a tubular thermion emitting member 5 fixed to the inner circumferential face at the opening side in said tubular discharge chamber 1 and an orifice section 6 fixed to the open end in said chamber 1. The orifice section 6 is formed with a porous board having a plurality of through-holes. While a heater 7 wound spirally and coaxially with the cathode 2 is provided at the outer circumference at the other end of the hollow cathode 2 and a thermal shield board 9 is provided on the outer circumference of the cathode 2 while surrounding the heater 7. Consequently the discharge current can be increased while the service life of the cathode can be lengthened.
JP55184223A 1980-12-25 1980-12-25 Hollow-cathode discharge device Pending JPS57107540A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55184223A JPS57107540A (en) 1980-12-25 1980-12-25 Hollow-cathode discharge device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55184223A JPS57107540A (en) 1980-12-25 1980-12-25 Hollow-cathode discharge device

Publications (1)

Publication Number Publication Date
JPS57107540A true JPS57107540A (en) 1982-07-05

Family

ID=16149514

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55184223A Pending JPS57107540A (en) 1980-12-25 1980-12-25 Hollow-cathode discharge device

Country Status (1)

Country Link
JP (1) JPS57107540A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1162648A1 (en) * 1999-02-23 2001-12-12 Hamamatsu Photonics K.K. Hollow-cathode lamp

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1162648A1 (en) * 1999-02-23 2001-12-12 Hamamatsu Photonics K.K. Hollow-cathode lamp
EP1162648A4 (en) * 1999-02-23 2002-05-02 Hamamatsu Photonics Kk Hollow-cathode lamp
US6548958B2 (en) 1999-02-23 2003-04-15 Hamamatsu Photonics K.K. Hollow cathode lamp

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