JPS5710411A - Measuring device for profile - Google Patents

Measuring device for profile

Info

Publication number
JPS5710411A
JPS5710411A JP8498780A JP8498780A JPS5710411A JP S5710411 A JPS5710411 A JP S5710411A JP 8498780 A JP8498780 A JP 8498780A JP 8498780 A JP8498780 A JP 8498780A JP S5710411 A JPS5710411 A JP S5710411A
Authority
JP
Japan
Prior art keywords
probe
fulcrum
measured
profile
point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8498780A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6359444B2 (enrdf_load_stackoverflow
Inventor
Makoto Sakai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Seimitsu Co Ltd
Original Assignee
Tokyo Seimitsu Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Seimitsu Co Ltd filed Critical Tokyo Seimitsu Co Ltd
Priority to JP8498780A priority Critical patent/JPS5710411A/ja
Publication of JPS5710411A publication Critical patent/JPS5710411A/ja
Publication of JPS6359444B2 publication Critical patent/JPS6359444B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/20—Measuring arrangements characterised by the use of mechanical techniques for measuring contours or curvatures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP8498780A 1980-06-23 1980-06-23 Measuring device for profile Granted JPS5710411A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8498780A JPS5710411A (en) 1980-06-23 1980-06-23 Measuring device for profile

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8498780A JPS5710411A (en) 1980-06-23 1980-06-23 Measuring device for profile

Publications (2)

Publication Number Publication Date
JPS5710411A true JPS5710411A (en) 1982-01-20
JPS6359444B2 JPS6359444B2 (enrdf_load_stackoverflow) 1988-11-18

Family

ID=13845967

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8498780A Granted JPS5710411A (en) 1980-06-23 1980-06-23 Measuring device for profile

Country Status (1)

Country Link
JP (1) JPS5710411A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5930003A (ja) * 1982-08-12 1984-02-17 Matsutani Seisakusho:Kk 切削具の形状測定方法及びその装置
JPS60154809U (ja) * 1984-03-24 1985-10-15 三菱重工業株式会社 ロ−ラミル内粉砕物層厚さ測定装置
US4989338A (en) * 1988-10-01 1991-02-05 Ngk Insulators, Ltd. V-shaped groove inspecting and working method
US6516528B1 (en) * 2000-10-24 2003-02-11 Advanced Micro Devices, Inc. System and method to determine line edge roughness and/or linewidth
JP2016145771A (ja) * 2015-02-09 2016-08-12 株式会社ミツトヨ テストインジケータ

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5132351A (ja) * 1974-09-11 1976-03-18 Mitsutoyo Seisakusho Setsushokugatakeijosokuteiki
JPS5180254A (en) * 1975-01-07 1976-07-13 Mitsutoyo Seisakusho Keijosokuteikino enkogosahoseihoshiki
JPS51105848A (ja) * 1975-03-14 1976-09-20 Tokyo Seimitsu Co Ltd Keijosokuteihoho
JPS5249859A (en) * 1975-10-17 1977-04-21 Kosaka Kenkyusho:Kk Device for measuring shape using electrical correction
JPS5421271A (en) * 1977-07-19 1979-02-17 Mitsubishi Electric Corp Pattern forming method
JPS5426387A (en) * 1977-07-29 1979-02-27 Roi Oosuchin Robaato Apparatus for producing carbonated water

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5132351A (ja) * 1974-09-11 1976-03-18 Mitsutoyo Seisakusho Setsushokugatakeijosokuteiki
JPS5180254A (en) * 1975-01-07 1976-07-13 Mitsutoyo Seisakusho Keijosokuteikino enkogosahoseihoshiki
JPS51105848A (ja) * 1975-03-14 1976-09-20 Tokyo Seimitsu Co Ltd Keijosokuteihoho
JPS5249859A (en) * 1975-10-17 1977-04-21 Kosaka Kenkyusho:Kk Device for measuring shape using electrical correction
JPS5421271A (en) * 1977-07-19 1979-02-17 Mitsubishi Electric Corp Pattern forming method
JPS5426387A (en) * 1977-07-29 1979-02-27 Roi Oosuchin Robaato Apparatus for producing carbonated water

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5930003A (ja) * 1982-08-12 1984-02-17 Matsutani Seisakusho:Kk 切削具の形状測定方法及びその装置
JPS60154809U (ja) * 1984-03-24 1985-10-15 三菱重工業株式会社 ロ−ラミル内粉砕物層厚さ測定装置
US4989338A (en) * 1988-10-01 1991-02-05 Ngk Insulators, Ltd. V-shaped groove inspecting and working method
US6516528B1 (en) * 2000-10-24 2003-02-11 Advanced Micro Devices, Inc. System and method to determine line edge roughness and/or linewidth
JP2016145771A (ja) * 2015-02-09 2016-08-12 株式会社ミツトヨ テストインジケータ

Also Published As

Publication number Publication date
JPS6359444B2 (enrdf_load_stackoverflow) 1988-11-18

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