JPS5697831A - Measuring method for fine flow rate - Google Patents
Measuring method for fine flow rateInfo
- Publication number
- JPS5697831A JPS5697831A JP17265579A JP17265579A JPS5697831A JP S5697831 A JPS5697831 A JP S5697831A JP 17265579 A JP17265579 A JP 17265579A JP 17265579 A JP17265579 A JP 17265579A JP S5697831 A JPS5697831 A JP S5697831A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- measured
- flow rate
- concentration
- flow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Volume Flow (AREA)
Abstract
PURPOSE: To measure the fine amount of draft gas, by measuring the concentration of a gas component to be measured in mixed gas of a gas flow of known concentration to be measured and reference gas flow of a constant flow rate.
CONSTITUTION: Gas to be measured from measured-gas cylinder 8 of system 1 to be measured is regulated by pressure regulator 9 and constant-pressure-difference regulator 10 and then passed through draft-rate or leakage measurement sample 11 to obtain gas of known concentration C0 and flow rate (f) to be measured, and this gas is mixed with reference gas of constant flow rate F passed through reference gas supply system 2, flow meter 4, etc., to apply the mixture to high-sensitivity gas analyzer 7. Then, analyzer 7 measures concentration CS of the gas to be measured to calculate fine ventilating gas amount (f) by the concentration ratio based upon expression I.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17265579A JPS5697831A (en) | 1979-12-31 | 1979-12-31 | Measuring method for fine flow rate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17265579A JPS5697831A (en) | 1979-12-31 | 1979-12-31 | Measuring method for fine flow rate |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5697831A true JPS5697831A (en) | 1981-08-06 |
Family
ID=15945915
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17265579A Pending JPS5697831A (en) | 1979-12-31 | 1979-12-31 | Measuring method for fine flow rate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5697831A (en) |
-
1979
- 1979-12-31 JP JP17265579A patent/JPS5697831A/en active Pending
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