JPS5697831A - Measuring method for fine flow rate - Google Patents

Measuring method for fine flow rate

Info

Publication number
JPS5697831A
JPS5697831A JP17265579A JP17265579A JPS5697831A JP S5697831 A JPS5697831 A JP S5697831A JP 17265579 A JP17265579 A JP 17265579A JP 17265579 A JP17265579 A JP 17265579A JP S5697831 A JPS5697831 A JP S5697831A
Authority
JP
Japan
Prior art keywords
gas
measured
flow rate
concentration
flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17265579A
Other languages
Japanese (ja)
Inventor
Kenji Kunihara
Yoshikazu Hirose
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP17265579A priority Critical patent/JPS5697831A/en
Publication of JPS5697831A publication Critical patent/JPS5697831A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To measure the fine amount of draft gas, by measuring the concentration of a gas component to be measured in mixed gas of a gas flow of known concentration to be measured and reference gas flow of a constant flow rate.
CONSTITUTION: Gas to be measured from measured-gas cylinder 8 of system 1 to be measured is regulated by pressure regulator 9 and constant-pressure-difference regulator 10 and then passed through draft-rate or leakage measurement sample 11 to obtain gas of known concentration C0 and flow rate (f) to be measured, and this gas is mixed with reference gas of constant flow rate F passed through reference gas supply system 2, flow meter 4, etc., to apply the mixture to high-sensitivity gas analyzer 7. Then, analyzer 7 measures concentration CS of the gas to be measured to calculate fine ventilating gas amount (f) by the concentration ratio based upon expression I.
COPYRIGHT: (C)1981,JPO&Japio
JP17265579A 1979-12-31 1979-12-31 Measuring method for fine flow rate Pending JPS5697831A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17265579A JPS5697831A (en) 1979-12-31 1979-12-31 Measuring method for fine flow rate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17265579A JPS5697831A (en) 1979-12-31 1979-12-31 Measuring method for fine flow rate

Publications (1)

Publication Number Publication Date
JPS5697831A true JPS5697831A (en) 1981-08-06

Family

ID=15945915

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17265579A Pending JPS5697831A (en) 1979-12-31 1979-12-31 Measuring method for fine flow rate

Country Status (1)

Country Link
JP (1) JPS5697831A (en)

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