JPS5689578A - Thermal head and manufacture thereof - Google Patents
Thermal head and manufacture thereofInfo
- Publication number
- JPS5689578A JPS5689578A JP16588479A JP16588479A JPS5689578A JP S5689578 A JPS5689578 A JP S5689578A JP 16588479 A JP16588479 A JP 16588479A JP 16588479 A JP16588479 A JP 16588479A JP S5689578 A JPS5689578 A JP S5689578A
- Authority
- JP
- Japan
- Prior art keywords
- film
- heating resistor
- thermal head
- nitride
- silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000010438 heat treatment Methods 0.000 abstract 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract 2
- 150000004767 nitrides Chemical class 0.000 abstract 2
- 229910052710 silicon Inorganic materials 0.000 abstract 2
- 239000010703 silicon Substances 0.000 abstract 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 abstract 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 abstract 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 1
- 229910052804 chromium Inorganic materials 0.000 abstract 1
- 239000011651 chromium Substances 0.000 abstract 1
- 239000004020 conductor Substances 0.000 abstract 1
- 239000007789 gas Substances 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
- 229910052751 metal Inorganic materials 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 150000002739 metals Chemical class 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 229910052757 nitrogen Inorganic materials 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 229910052715 tantalum Inorganic materials 0.000 abstract 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 abstract 1
- 229910052719 titanium Inorganic materials 0.000 abstract 1
- 239000010936 titanium Substances 0.000 abstract 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 abstract 1
- 229910052721 tungsten Inorganic materials 0.000 abstract 1
- 239000010937 tungsten Substances 0.000 abstract 1
Landscapes
- Electronic Switches (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Non-Adjustable Resistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16588479A JPS5689578A (en) | 1979-12-19 | 1979-12-19 | Thermal head and manufacture thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16588479A JPS5689578A (en) | 1979-12-19 | 1979-12-19 | Thermal head and manufacture thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5689578A true JPS5689578A (en) | 1981-07-20 |
Family
ID=15820801
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16588479A Pending JPS5689578A (en) | 1979-12-19 | 1979-12-19 | Thermal head and manufacture thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5689578A (ja) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5814501A (ja) * | 1981-07-17 | 1983-01-27 | 大精電子株式会社 | タンタル・シリコン・窒素薄膜抵抗体 |
| JPS5955001A (ja) * | 1982-08-24 | 1984-03-29 | エヌ・ベ−・フイリツプス・フル−イランペンフアブリケン | 抵抗およびその製造方法 |
| US4827289A (en) * | 1985-08-12 | 1989-05-02 | Mitsubishi Denki Kabushiki Kaisha | Thermal head |
| US5077563A (en) * | 1986-04-10 | 1991-12-31 | Ngk Insulators, Ltd. | Thermally printing head operable with electrically resistive layer provided on printt film or ribbon or on recording medium |
| US6527813B1 (en) | 1996-08-22 | 2003-03-04 | Canon Kabushiki Kaisha | Ink jet head substrate, an ink jet head, an ink jet apparatus, and a method for manufacturing an ink jet recording head |
| US7216960B2 (en) | 2003-11-06 | 2007-05-15 | Canon Kabushiki Kaisha | Method of driving a printhead using a constant current and operating MOS transistor in saturation region |
| US7344218B2 (en) | 2003-11-06 | 2008-03-18 | Canon Kabushiki Kaisha | Printhead driving method, printhead substrate, printhead, head cartridge and printing apparatus |
-
1979
- 1979-12-19 JP JP16588479A patent/JPS5689578A/ja active Pending
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5814501A (ja) * | 1981-07-17 | 1983-01-27 | 大精電子株式会社 | タンタル・シリコン・窒素薄膜抵抗体 |
| JPS5955001A (ja) * | 1982-08-24 | 1984-03-29 | エヌ・ベ−・フイリツプス・フル−イランペンフアブリケン | 抵抗およびその製造方法 |
| JPH0376561B2 (ja) * | 1982-08-24 | 1991-12-05 | Fuiritsupusu Furuuiranpenfuaburiken Nv | |
| US4827289A (en) * | 1985-08-12 | 1989-05-02 | Mitsubishi Denki Kabushiki Kaisha | Thermal head |
| US5077563A (en) * | 1986-04-10 | 1991-12-31 | Ngk Insulators, Ltd. | Thermally printing head operable with electrically resistive layer provided on printt film or ribbon or on recording medium |
| US6527813B1 (en) | 1996-08-22 | 2003-03-04 | Canon Kabushiki Kaisha | Ink jet head substrate, an ink jet head, an ink jet apparatus, and a method for manufacturing an ink jet recording head |
| US6769762B2 (en) | 1996-08-22 | 2004-08-03 | Canon Kabushiki Kaisha | Ink jet head substrate, an ink jet head, an ink jet apparatus, and a method for manufacturing an ink jet recording head |
| US7216960B2 (en) | 2003-11-06 | 2007-05-15 | Canon Kabushiki Kaisha | Method of driving a printhead using a constant current and operating MOS transistor in saturation region |
| US7344218B2 (en) | 2003-11-06 | 2008-03-18 | Canon Kabushiki Kaisha | Printhead driving method, printhead substrate, printhead, head cartridge and printing apparatus |
| US7575294B2 (en) | 2003-11-06 | 2009-08-18 | Canon Kabushiki Kaisha | Printhead substrate, printhead using the substrate, head cartridge including the printhead, method of driving the printhead, and printing apparatus using the printhead |
| US8002374B2 (en) | 2003-11-06 | 2011-08-23 | Canon Kabushiki Kaisha | Printhead driving method, printhead substrate, printhead, head cartridge, and printing apparatus |
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